Enhanced Surface-Plasmon-Polariton Interference for Nanolithography by a Micro-Cylinder-Lens Array - 梁慧敏 王景全 范锋 秦爱丽 张春元 成惠 (Chinese physics letters, 2010)
Keywords: Arrays; Cylinders; Interference; Lenses; Nanocomposites; Nanomaterials; Nanostructure; Resists; 刻蚀技术; 圆柱透镜; 干涉光刻; 表面等离子体; 透镜阵列; 金属薄膜