Curved hole drilling by laser manipulation of a heat spot inside glass

A fiber fuse is a heat spot that propagates toward a light source with bright emission. This occurs when the fiber transmits a high-intensity laser and is triggered by heating with contamination on the edge. Glass is transparent and allows near-infrared light to pass through it at room temperature;...

Full description

Saved in:
Bibliographic Details
Published inPrecision engineering Vol. 81; pp. 1 - 7
Main Authors Miyakoda, Kaito, Sunayama, Koki, Sakamoto, Kosuke, Tokunaga, Daijiro, Hidai, Hirofumi, Matsusaka, Souta
Format Journal Article
LanguageEnglish
Published Elsevier Inc 01.05.2023
Subjects
Online AccessGet full text
ISSN0141-6359
1873-2372
DOI10.1016/j.precisioneng.2023.01.008

Cover

Abstract A fiber fuse is a heat spot that propagates toward a light source with bright emission. This occurs when the fiber transmits a high-intensity laser and is triggered by heating with contamination on the edge. Glass is transparent and allows near-infrared light to pass through it at room temperature; however, it absorbs light at high temperatures. Hence, once a heat spot forms in the glass, it maintains a high temperature and propagates toward the light source. In straight hole drilling, this phenomenon of leading the heat spot toward the glass surface and ejecting the heated glass to form a hole has been utilized. In this study, heat-spot manipulation was demonstrated by laser scanning, and curved modification was observed. The emissions did not follow the scan and disappeared at high scanning speeds. The conditions under which the emission followed the scan were experimentally determined by changing the scanning speed. Curved hole formation was also demonstrated by manipulation of the heat spot and ejection of the heated glass. The obtained hole had a curvature radius of approximately 320 μm, length of approximately 860 μm, and diameter of approximately 17 μm. •Heat spot manipulation was demonstrated using laser scanning.•A curved hole formation was demonstrated by the ejection of the heated glass.•The limitations of heat spot manipulation were elucidated experimentally.
AbstractList A fiber fuse is a heat spot that propagates toward a light source with bright emission. This occurs when the fiber transmits a high-intensity laser and is triggered by heating with contamination on the edge. Glass is transparent and allows near-infrared light to pass through it at room temperature; however, it absorbs light at high temperatures. Hence, once a heat spot forms in the glass, it maintains a high temperature and propagates toward the light source. In straight hole drilling, this phenomenon of leading the heat spot toward the glass surface and ejecting the heated glass to form a hole has been utilized. In this study, heat-spot manipulation was demonstrated by laser scanning, and curved modification was observed. The emissions did not follow the scan and disappeared at high scanning speeds. The conditions under which the emission followed the scan were experimentally determined by changing the scanning speed. Curved hole formation was also demonstrated by manipulation of the heat spot and ejection of the heated glass. The obtained hole had a curvature radius of approximately 320 μm, length of approximately 860 μm, and diameter of approximately 17 μm. •Heat spot manipulation was demonstrated using laser scanning.•A curved hole formation was demonstrated by the ejection of the heated glass.•The limitations of heat spot manipulation were elucidated experimentally.
Author Tokunaga, Daijiro
Miyakoda, Kaito
Matsusaka, Souta
Sunayama, Koki
Sakamoto, Kosuke
Hidai, Hirofumi
Author_xml – sequence: 1
  givenname: Kaito
  surname: Miyakoda
  fullname: Miyakoda, Kaito
  organization: Department of Mechanical Engineering, Chiba University, 1-33, Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan
– sequence: 2
  givenname: Koki
  surname: Sunayama
  fullname: Sunayama, Koki
  organization: Department of Mechanical Engineering, Chiba University, 1-33, Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan
– sequence: 3
  givenname: Kosuke
  surname: Sakamoto
  fullname: Sakamoto, Kosuke
  organization: Department of Mechanical Engineering, Chiba University, 1-33, Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan
– sequence: 4
  givenname: Daijiro
  surname: Tokunaga
  fullname: Tokunaga, Daijiro
  organization: Department of Mechanical Engineering, Chiba University, 1-33, Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan
– sequence: 5
  givenname: Hirofumi
  orcidid: 0000-0001-6440-5697
  surname: Hidai
  fullname: Hidai, Hirofumi
  email: hidai@faculty.chiba-u.jp
  organization: Department of Mechanical Engineering, Chiba University, 1-33, Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan
– sequence: 6
  givenname: Souta
  surname: Matsusaka
  fullname: Matsusaka, Souta
  organization: Department of Mechanical Engineering, Chiba University, 1-33, Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan
BookMark eNqNkE1LAzEQhoNUsFX_Q_C-62RnP7KelGpVKHjRc0iT2TZlu1uSbaH_3tR6EE89DbzM-wzzTNio6zti7E5AKkCU9-t068m44GLcLdMMMkxBpADygo2FrDDJsMpGbAwiF0mJRX3FJiGsAaCSkI_ZbLrze7J81bfErXdt67olXxx4qwN5vtGd2-5aPcQDvG-45ivSAw_bfuCuC84SX8bNcMMuG90Guv2d1-xr9vI5fUvmH6_v06d5YrJaDkmNpRE12YbQCKxzbCqJtcjyUpYEgDIvrC6k0CbPcokiRoVpRGWrskZcIF6zhxPX-D4ET43aerfR_qAEqKMRtVZ_jaijEQVCRSOx_PivbNzw89rgtWvPQzyfEBSf3DvyKhhHnSHrYmVQtnfnYL4BcCeIFw
CitedBy_id crossref_primary_10_31857_S1234567824140118
crossref_primary_10_1134_S002136402460174X
Cites_doi 10.1007/s00339-009-5324-x
10.2493/jjspe.65.245
10.1111/j.1551-2916.2010.03615.x
10.1364/OE.17.008685
10.2493/jjspe.64.1062
10.1007/s00339-019-2691-9
10.2493/jjspe.81.435
10.1007/s00339-006-3603-3
10.1016/j.precisioneng.2016.04.004
10.1007/s00339-004-2547-8
10.1007/s00339-021-04998-5
10.1007/s00339-012-7477-2
10.1016/j.precisioneng.2019.07.021
10.2961/jlmn.2012.01.0001
10.1007/s00339-017-1242-5
10.1299/kikaic.73.2619
10.1007/s00339-016-9785-4
ContentType Journal Article
Copyright 2023 Elsevier Inc.
Copyright_xml – notice: 2023 Elsevier Inc.
DBID AAYXX
CITATION
DOI 10.1016/j.precisioneng.2023.01.008
DatabaseName CrossRef
DatabaseTitle CrossRef
DatabaseTitleList
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
EISSN 1873-2372
EndPage 7
ExternalDocumentID 10_1016_j_precisioneng_2023_01_008
S0141635923000089
GroupedDBID --K
--M
.~1
0R~
123
1B1
1~.
1~5
29O
4.4
457
4G.
5VS
7-5
71M
8P~
9JN
AABXZ
AACTN
AAEDT
AAEDW
AAEPC
AAIAV
AAIKJ
AAKOC
AALRI
AAOAW
AAQFI
AAQXK
AAXUO
ABFNM
ABJNI
ABMAC
ABXDB
ABXRA
ABYKQ
ACDAQ
ACGFS
ACNNM
ACRLP
ADBBV
ADEZE
ADMUD
ADTZH
AEBSH
AECPX
AEKER
AEZYN
AFKWA
AFRZQ
AFTJW
AGHFR
AGUBO
AGYEJ
AHHHB
AHJVU
AIEXJ
AIKHN
AITUG
AJBFU
AJOXV
ALMA_UNASSIGNED_HOLDINGS
AMFUW
AMRAJ
ASPBG
AVWKF
AXJTR
AZFZN
BJAXD
BKOJK
BLXMC
CS3
EBS
EFJIC
EFLBG
EJD
EO8
EO9
EP2
EP3
FDB
FEDTE
FGOYB
FIRID
FNPLU
FYGXN
G-2
G-Q
GBLVA
HVGLF
HZ~
IHE
J1W
JJJVA
KOM
LY7
M41
MAGPM
MO0
N9A
O-L
O9-
OAUVE
OZT
P-8
P-9
P2P
PC.
Q38
R2-
RIG
RNS
ROL
RPZ
SDF
SDG
SDP
SES
SET
SEW
SPC
SPCBC
SSM
SST
SSZ
T5K
TN5
UHS
WH7
WUQ
XPP
ZMT
~G-
AATTM
AAXKI
AAYWO
AAYXX
ABWVN
ACLOT
ACRPL
ADNMO
AEIPS
AFJKZ
AGQPQ
AIIUN
ANKPU
APXCP
CITATION
EFKBS
~HD
ID FETCH-LOGICAL-c298t-936c19edfe3c13943f7839124686e003845da581ac4248310035cf17d76933b33
IEDL.DBID .~1
ISSN 0141-6359
IngestDate Wed Oct 01 02:54:30 EDT 2025
Thu Apr 24 23:13:00 EDT 2025
Fri Feb 23 02:38:13 EST 2024
IsPeerReviewed true
IsScholarly true
Keywords Silica glass
Laser drilling
Curved hole
Glass
Fiber fuse
Language English
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-c298t-936c19edfe3c13943f7839124686e003845da581ac4248310035cf17d76933b33
ORCID 0000-0001-6440-5697
PageCount 7
ParticipantIDs crossref_primary_10_1016_j_precisioneng_2023_01_008
crossref_citationtrail_10_1016_j_precisioneng_2023_01_008
elsevier_sciencedirect_doi_10_1016_j_precisioneng_2023_01_008
ProviderPackageCode CITATION
AAYXX
PublicationCentury 2000
PublicationDate 2023-05-01
PublicationDateYYYYMMDD 2023-05-01
PublicationDate_xml – month: 05
  year: 2023
  text: 2023-05-01
  day: 01
PublicationDecade 2020
PublicationTitle Precision engineering
PublicationYear 2023
Publisher Elsevier Inc
Publisher_xml – name: Elsevier Inc
References Itoh, Hidai, Tokura (bib12) 2013; 112
Hidai, Yoshioka, Hiromatsu, Tokura (bib10) 2009; 96
Sato, Hidai, Matsusaka, Chiba, Morita (bib18) 2021; 127
Hidai, Saito, Matsusaka, Chiba, Morita (bib14) 2016; 122
Ishida, Takeuchi (bib1) 1999; 65
Vishnubhatla, Bellini, Ramponi, Cerullo, Osellame (bib5) 2009; 17
Yamaguchi, Okada, Miyake (bib2) 2015; 81
Matsuo, Tabuchi, Okada, Juodkazis, Misawa (bib7) 2006; 84
Shun, Tokunaga, Hidai, Matsusaka, Chiba, Morita (bib16) 2019; 60
Tokunaga, Sato, Hidai, Matsusaka, Chiba, Morita (bib17) 2019; 125
Todoroki (bib11) 2013
Hidai, Yoshioka, Hiromatsu, Tokura (bib13) 2010; 93
Saito, Hidai, Matsusaka, Chiba, Morita (bib15) 2017; 123
Hidai, Kuroki, Matsusaka, Chiba, Morita (bib4) 2016; 46
Ikeno, Masugi, Horiuchi, Kasai, Kobayashi (bib9) 1998; 64
Bellouard, Champion, Lenssen, Matteucci, Schaap, Beresna, Corbari, Gecevičius, Kazansky, Chappuis, Kral, Clavel, Barrot, Breguet, Mabillard, Bottinelli, Hopper, Hoenninger, Mottay, Lopez (bib6) 2012; 7
Sasahara, Nagao, Chino (bib3) 2007; 73
Hwang, Choi, Grigoropoulos (bib8) 2004; 79
Hidai (10.1016/j.precisioneng.2023.01.008_bib4) 2016; 46
Sasahara (10.1016/j.precisioneng.2023.01.008_bib3) 2007; 73
Hidai (10.1016/j.precisioneng.2023.01.008_bib10) 2009; 96
Shun (10.1016/j.precisioneng.2023.01.008_bib16) 2019; 60
Tokunaga (10.1016/j.precisioneng.2023.01.008_bib17) 2019; 125
Hidai (10.1016/j.precisioneng.2023.01.008_bib13) 2010; 93
Hwang (10.1016/j.precisioneng.2023.01.008_bib8) 2004; 79
Bellouard (10.1016/j.precisioneng.2023.01.008_bib6) 2012; 7
Todoroki (10.1016/j.precisioneng.2023.01.008_bib11) 2013
Hidai (10.1016/j.precisioneng.2023.01.008_bib14) 2016; 122
Ikeno (10.1016/j.precisioneng.2023.01.008_bib9) 1998; 64
Sato (10.1016/j.precisioneng.2023.01.008_bib18) 2021; 127
Yamaguchi (10.1016/j.precisioneng.2023.01.008_bib2) 2015; 81
Ishida (10.1016/j.precisioneng.2023.01.008_bib1) 1999; 65
Matsuo (10.1016/j.precisioneng.2023.01.008_bib7) 2006; 84
Itoh (10.1016/j.precisioneng.2023.01.008_bib12) 2013; 112
Saito (10.1016/j.precisioneng.2023.01.008_bib15) 2017; 123
Vishnubhatla (10.1016/j.precisioneng.2023.01.008_bib5) 2009; 17
References_xml – volume: 7
  start-page: 1
  year: 2012
  ident: bib6
  article-title: The femtoprint project
  publication-title: J. Laser Micro/Nanoengin.
– volume: 73
  start-page: 2619
  year: 2007
  ident: bib3
  article-title: Electrochemical curved hole machining with electrode posture control system(machine elements and manufacturing)
  publication-title: Trans. Jpn. Soc. Mechan. Engin. C
– volume: 93
  start-page: 1597
  year: 2010
  ident: bib13
  article-title: Structural changes in silica glass by continuous-wave laser backside irradiation
  publication-title: J Am Ceram Soc
– volume: 79
  start-page: 605
  year: 2004
  ident: bib8
  article-title: Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass
  publication-title: Appl Phys A
– year: 2013
  ident: bib11
  article-title: Fiber fuse: light-induced continuous breakdown of silica glass optical fiber
  publication-title: Springer Tokyo
– volume: 112
  start-page: 1043
  year: 2013
  ident: bib12
  article-title: Experimental and numerical study on mechanism of glass modification process by continuous-wave laser backside irradiation (CW-LBI)
  publication-title: Appl Phys A
– volume: 123
  start-page: 643
  year: 2017
  ident: bib15
  article-title: Synthesis of silica glass fibers and nanoparticles by continuous-wave laser backside irradiation
  publication-title: Appl Phys A
– volume: 125
  start-page: 400
  year: 2019
  ident: bib17
  article-title: A novel method of triggering fiber fuse inside glass by optical breakdown and glass drilling as its application
  publication-title: Appl Phys A
– volume: 122
  start-page: 277
  year: 2016
  ident: bib14
  article-title: Deep drilling of silica glass by continuous-wave laser backside irradiation
  publication-title: Appl Phys A
– volume: 65
  start-page: 245
  year: 1999
  ident: bib1
  article-title: Curved hole machining by self-movable mechanism with electrical discharge machining function: development of automatic discharge gap controller
  publication-title: J Jpn Soc Precis Eng
– volume: 81
  start-page: 435
  year: 2015
  ident: bib2
  article-title: Development of curved hole drilling method by EDM with suspended ball electrode–optimization of suspending parts structure and possibility of curved hole drilling
  publication-title: J Jpn Soc Precis Eng
– volume: 46
  start-page: 96
  year: 2016
  ident: bib4
  article-title: Curved drilling via inner hole laser reflection
  publication-title: Precis Eng
– volume: 17
  start-page: 8685
  year: 2009
  ident: bib5
  article-title: Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching
  publication-title: Opt Express
– volume: 60
  start-page: 189
  year: 2019
  ident: bib16
  article-title: Branched hole drilling in silica glass by continuous-wave laser backside irradiation
  publication-title: Precis Eng
– volume: 127
  start-page: 894
  year: 2021
  ident: bib18
  article-title: Void formation in bulk silica glass by fiber fuse induced with a focused laser beam
  publication-title: Appl Phys A
– volume: 64
  start-page: 1062
  year: 1998
  ident: bib9
  article-title: Crack-free and 3-dimensional YAG laser processing of glass-ceramics
  publication-title: J Jpn Soc Precis Eng
– volume: 84
  start-page: 99
  year: 2006
  ident: bib7
  article-title: Femtosecond laser assisted etching of quartz: microstructuring from inside
  publication-title: Appl Phys A
– volume: 96
  start-page: 869
  year: 2009
  ident: bib10
  article-title: Glass modification by continuous-wave laser backside irradiation (CW-LBI)
  publication-title: Appl Phys A
– volume: 96
  start-page: 869
  year: 2009
  ident: 10.1016/j.precisioneng.2023.01.008_bib10
  article-title: Glass modification by continuous-wave laser backside irradiation (CW-LBI)
  publication-title: Appl Phys A
  doi: 10.1007/s00339-009-5324-x
– volume: 65
  start-page: 245
  year: 1999
  ident: 10.1016/j.precisioneng.2023.01.008_bib1
  article-title: Curved hole machining by self-movable mechanism with electrical discharge machining function: development of automatic discharge gap controller
  publication-title: J Jpn Soc Precis Eng
  doi: 10.2493/jjspe.65.245
– volume: 93
  start-page: 1597
  year: 2010
  ident: 10.1016/j.precisioneng.2023.01.008_bib13
  article-title: Structural changes in silica glass by continuous-wave laser backside irradiation
  publication-title: J Am Ceram Soc
  doi: 10.1111/j.1551-2916.2010.03615.x
– volume: 17
  start-page: 8685
  year: 2009
  ident: 10.1016/j.precisioneng.2023.01.008_bib5
  article-title: Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching
  publication-title: Opt Express
  doi: 10.1364/OE.17.008685
– volume: 64
  start-page: 1062
  year: 1998
  ident: 10.1016/j.precisioneng.2023.01.008_bib9
  article-title: Crack-free and 3-dimensional YAG laser processing of glass-ceramics
  publication-title: J Jpn Soc Precis Eng
  doi: 10.2493/jjspe.64.1062
– volume: 125
  start-page: 400
  year: 2019
  ident: 10.1016/j.precisioneng.2023.01.008_bib17
  article-title: A novel method of triggering fiber fuse inside glass by optical breakdown and glass drilling as its application
  publication-title: Appl Phys A
  doi: 10.1007/s00339-019-2691-9
– volume: 81
  start-page: 435
  year: 2015
  ident: 10.1016/j.precisioneng.2023.01.008_bib2
  article-title: Development of curved hole drilling method by EDM with suspended ball electrode–optimization of suspending parts structure and possibility of curved hole drilling
  publication-title: J Jpn Soc Precis Eng
  doi: 10.2493/jjspe.81.435
– volume: 84
  start-page: 99
  year: 2006
  ident: 10.1016/j.precisioneng.2023.01.008_bib7
  article-title: Femtosecond laser assisted etching of quartz: microstructuring from inside
  publication-title: Appl Phys A
  doi: 10.1007/s00339-006-3603-3
– volume: 46
  start-page: 96
  year: 2016
  ident: 10.1016/j.precisioneng.2023.01.008_bib4
  article-title: Curved drilling via inner hole laser reflection
  publication-title: Precis Eng
  doi: 10.1016/j.precisioneng.2016.04.004
– volume: 79
  start-page: 605
  year: 2004
  ident: 10.1016/j.precisioneng.2023.01.008_bib8
  article-title: Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass
  publication-title: Appl Phys A
  doi: 10.1007/s00339-004-2547-8
– volume: 127
  start-page: 894
  year: 2021
  ident: 10.1016/j.precisioneng.2023.01.008_bib18
  article-title: Void formation in bulk silica glass by fiber fuse induced with a focused laser beam
  publication-title: Appl Phys A
  doi: 10.1007/s00339-021-04998-5
– volume: 112
  start-page: 1043
  year: 2013
  ident: 10.1016/j.precisioneng.2023.01.008_bib12
  article-title: Experimental and numerical study on mechanism of glass modification process by continuous-wave laser backside irradiation (CW-LBI)
  publication-title: Appl Phys A
  doi: 10.1007/s00339-012-7477-2
– volume: 60
  start-page: 189
  year: 2019
  ident: 10.1016/j.precisioneng.2023.01.008_bib16
  article-title: Branched hole drilling in silica glass by continuous-wave laser backside irradiation
  publication-title: Precis Eng
  doi: 10.1016/j.precisioneng.2019.07.021
– volume: 7
  start-page: 1
  year: 2012
  ident: 10.1016/j.precisioneng.2023.01.008_bib6
  article-title: The femtoprint project
  publication-title: J. Laser Micro/Nanoengin.
  doi: 10.2961/jlmn.2012.01.0001
– volume: 123
  start-page: 643
  year: 2017
  ident: 10.1016/j.precisioneng.2023.01.008_bib15
  article-title: Synthesis of silica glass fibers and nanoparticles by continuous-wave laser backside irradiation
  publication-title: Appl Phys A
  doi: 10.1007/s00339-017-1242-5
– volume: 73
  start-page: 2619
  year: 2007
  ident: 10.1016/j.precisioneng.2023.01.008_bib3
  article-title: Electrochemical curved hole machining with electrode posture control system(machine elements and manufacturing)
  publication-title: Trans. Jpn. Soc. Mechan. Engin. C
  doi: 10.1299/kikaic.73.2619
– volume: 122
  start-page: 277
  year: 2016
  ident: 10.1016/j.precisioneng.2023.01.008_bib14
  article-title: Deep drilling of silica glass by continuous-wave laser backside irradiation
  publication-title: Appl Phys A
  doi: 10.1007/s00339-016-9785-4
– year: 2013
  ident: 10.1016/j.precisioneng.2023.01.008_bib11
  article-title: Fiber fuse: light-induced continuous breakdown of silica glass optical fiber
  publication-title: Springer Tokyo
SSID ssj0007804
Score 2.3701034
Snippet A fiber fuse is a heat spot that propagates toward a light source with bright emission. This occurs when the fiber transmits a high-intensity laser and is...
SourceID crossref
elsevier
SourceType Enrichment Source
Index Database
Publisher
StartPage 1
SubjectTerms Curved hole
Fiber fuse
Glass
Laser drilling
Silica glass
Title Curved hole drilling by laser manipulation of a heat spot inside glass
URI https://dx.doi.org/10.1016/j.precisioneng.2023.01.008
Volume 81
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
journalDatabaseRights – providerCode: PRVESC
  databaseName: Baden-Württemberg Complete Freedom Collection (Elsevier)
  customDbUrl:
  eissn: 1873-2372
  dateEnd: 99991231
  omitProxy: true
  ssIdentifier: ssj0007804
  issn: 0141-6359
  databaseCode: GBLVA
  dateStart: 20110101
  isFulltext: true
  titleUrlDefault: https://www.sciencedirect.com
  providerName: Elsevier
– providerCode: PRVESC
  databaseName: Elsevier Freedom Collection
  customDbUrl:
  eissn: 1873-2372
  dateEnd: 99991231
  omitProxy: true
  ssIdentifier: ssj0007804
  issn: 0141-6359
  databaseCode: ACRLP
  dateStart: 19950101
  isFulltext: true
  titleUrlDefault: https://www.sciencedirect.com
  providerName: Elsevier
– providerCode: PRVESC
  databaseName: Elsevier SD Freedom Collection
  customDbUrl:
  eissn: 1873-2372
  dateEnd: 99991231
  omitProxy: true
  ssIdentifier: ssj0007804
  issn: 0141-6359
  databaseCode: .~1
  dateStart: 19950101
  isFulltext: true
  titleUrlDefault: https://www.sciencedirect.com
  providerName: Elsevier
– providerCode: PRVESC
  databaseName: Elsevier SD Freedom Collection Journals [SCFCJ]
  customDbUrl:
  eissn: 1873-2372
  dateEnd: 99991231
  omitProxy: true
  ssIdentifier: ssj0007804
  issn: 0141-6359
  databaseCode: AIKHN
  dateStart: 19950101
  isFulltext: true
  titleUrlDefault: https://www.sciencedirect.com
  providerName: Elsevier
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV1NS8NAEF1KvehB_MT6UfbgNW02m83HwUMplqrYk4Xels3uRiJSS0gFL_52ZzaJVvBQ8JiQgWSYzLyQN-8Rcp1okWqA0Z6xvvBCoTS8c8p6RiWxzXyjVIq7w4-zaDoP7xdi0SHjdhcGaZVN7697uuvWzZlhk83hqiiGSEsCMCEAoTjgg0t8qP4FNT34_KF5oMBOTWNkHl7dCo86jteqbI1sls8DNBJ3Ep5oNfnXkNoYPJMDst8gRjqqb-qQdOzyiOxt6Agek8l4Xb5bQ9HrlpqycDrbNPugAI1tSVHiorXpom85VRQ7MIUP2ooWzq-TOhB9QuaT26fx1GsMEjwdpEnlpTzSLLUmt1wDkgt5HgPegYkdJZHFf36hMEokTOkwCNFRzOdC5yw2aIDIM85PSXcJD39GqA8BLMk0y_Ms1AHUVxDFgQpUKnKmrOqRtM2I1I16OJpYvMqWJvYiN7MpMZvSZxKy2SP8O3ZVa2hsFXXTJl7-qggJzX6L-PN_xl-QXTyqyY2XpFuVa3sFAKTK-q7C-mRndPcwnX0BaXndFQ
linkProvider Elsevier
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV27asMwFL2kydB2KH3S9KmhqxvLsmxr6BBCg9M8pgSyCVmSi0tJg3EK_ftKfoQUOhS62hywL1dHx_jqHICHSFImjYx2lHap41MhzZoT2lEiCnXiKiGYPTs8nQXxwn9Z0mULBs1ZGDtWWXN_xeklW9dXenU1e-ss69mxJCMmqFEopfBhe9DxqeHkNnT6o3E82xKy9dipJhmxYwGN92g55rXOmyyb1eujzRIvXTxt2uRv-9TO3jM8hqNaNKJ-9Vwn0NKrUzjcsRI8g-Fgk39qhWzcLVJ5Vlpto-QLGXWsc2RdLpqkLvSRIoEsCSPzTVugrIzsRKWOPofF8Hk-iJ06I8GRHosKh5FAYqZVqok0Ys4naWgkj9m0gyjQ9refT5WgERbS93wbKuYSKlMcKpuBSBJCLqC9Mi9_Ccg1ABwlEqdp4kvPtJgXhJ7wBKMpFlp0gTUV4bI2ELc5Fu-8mRR747vV5Laa3MXcVLMLZItdVzYaf0I9NYXnP5qCG77_A_7qn_h72I_n0wmfjGbjaziwd6pZxxtoF_lG3xo9UiR3db99A_Vf38A
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Curved+hole+drilling+by+laser+manipulation+of+a+heat+spot+inside+glass&rft.jtitle=Precision+engineering&rft.au=Miyakoda%2C+Kaito&rft.au=Sunayama%2C+Koki&rft.au=Sakamoto%2C+Kosuke&rft.au=Tokunaga%2C+Daijiro&rft.date=2023-05-01&rft.issn=0141-6359&rft.volume=81&rft.spage=1&rft.epage=7&rft_id=info:doi/10.1016%2Fj.precisioneng.2023.01.008&rft.externalDBID=n%2Fa&rft.externalDocID=10_1016_j_precisioneng_2023_01_008
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0141-6359&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0141-6359&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0141-6359&client=summon