Measuring In-Plane Micro-Motion of Micro-Structure Using Optical Flow - 金翠云 靳世久 栗大超 王建林 (Transactions of Tianjin University, 2009)
Keywords: Engineering; Humanities and Social Sciences; Mechanical Engineering; MEMS; multidisciplinary; Science; 三维加工; 制造工艺; 微电子机械系统; micro-electronic mechanical system (MEMS); micro-motion; optical flow; stroboscopic imaging; label field; micro-electronic mechanical system(MEMS)