Anisotropic stress mechanisms for different dielectric multi-layer films deposited by ion-beam assisted deposition on flexible substrates - Chen, Hsi-Chao; Lu, Yu-Ru; Chen, Sheng-Bin (Thin solid films, 2023)
Keywords: Flexible electronics; Interferometry; Ion-beam assisted deposition; Multilayer; Stress behavior; Multilayer; Flexible electronics; Ion-beam assisted deposition; Stress behavior; Interferometry