Anisotropic stress mechanisms for different dielectric multi-layer films deposited by ion-beam assisted deposition on flexible substrates
•Three multilayer films are deposited on flexible substrates with ion-beam assisted deposition.•A phase-shifting shadow moiré interferometer used to measure the residual stress.•The different relative elasticity could potentially be used for stress relief.•The anisotropic stress of these multilayer...
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| Published in | Thin solid films Vol. 782; p. 140026 |
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| Main Authors | , , |
| Format | Journal Article |
| Language | English |
| Published |
Elsevier B.V
01.10.2023
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| Subjects | |
| Online Access | Get full text |
| ISSN | 0040-6090 1879-2731 |
| DOI | 10.1016/j.tsf.2023.140026 |
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| Abstract | •Three multilayer films are deposited on flexible substrates with ion-beam assisted deposition.•A phase-shifting shadow moiré interferometer used to measure the residual stress.•The different relative elasticity could potentially be used for stress relief.•The anisotropic stress of these multilayer films are analyzed with Mohr circle method.
This study simulates and tests various prototype multi-layer films on polyethylene terephthalate (PET) and polycarbonate (PC) substrates. The optical and stress response properties of three commonly used optoelectronic anti-reflector (AR) coatings (TiO2/SiO2)2, (Ta2O5/SiO2)2 and (Nb2O5/SiO2)2 were determined. A lab-designed phase-shifting shadow moiré interferometer and Mohr circle approach were used to collect and interpret data. Results showed that the refractive indices of the four different dielectric films were 2.24(TiO2) > 2.23(Nb2O5) > 2.1(Ta2O5) > 1.44(SiO2). The transmittances of the three different AR coatings, in decreasing order, were 95.28%(Ta2O5/SiO2)2 > 94.86%(TiO2/SiO2)2 > 94.03%(Nb2O5/SiO2)2. The maximum shear stress of three different AR coatings, in decreasing size, were (Nb2O5/SiO2)2 > (Ta2O5/SiO2)2 > (TiO2/SiO2)2, for both the PET and PC substrate; however, the maximum principal stresses of three different AR coatings were tensors for the PET substrate, and compressive for the PC substrate. The principal stresses recorded were -916 MPa (Nb2O5/SiO2)2 > 438 MPa (Ta2O5/SiO2)2 > 346 MPa (TiO2/SiO2)2 for PET, and -951 MPa (Nb2O5/SiO2)2 > -838 MPa (Ta2O5/SiO2)2 > -766 MPa (TiO2/SiO2)2 for PC. The different elasticity moduli (ΔE) and relative elasticity between the different film layers may potentially be used to mitigate stress relief in multilayer coatings. |
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| AbstractList | •Three multilayer films are deposited on flexible substrates with ion-beam assisted deposition.•A phase-shifting shadow moiré interferometer used to measure the residual stress.•The different relative elasticity could potentially be used for stress relief.•The anisotropic stress of these multilayer films are analyzed with Mohr circle method.
This study simulates and tests various prototype multi-layer films on polyethylene terephthalate (PET) and polycarbonate (PC) substrates. The optical and stress response properties of three commonly used optoelectronic anti-reflector (AR) coatings (TiO2/SiO2)2, (Ta2O5/SiO2)2 and (Nb2O5/SiO2)2 were determined. A lab-designed phase-shifting shadow moiré interferometer and Mohr circle approach were used to collect and interpret data. Results showed that the refractive indices of the four different dielectric films were 2.24(TiO2) > 2.23(Nb2O5) > 2.1(Ta2O5) > 1.44(SiO2). The transmittances of the three different AR coatings, in decreasing order, were 95.28%(Ta2O5/SiO2)2 > 94.86%(TiO2/SiO2)2 > 94.03%(Nb2O5/SiO2)2. The maximum shear stress of three different AR coatings, in decreasing size, were (Nb2O5/SiO2)2 > (Ta2O5/SiO2)2 > (TiO2/SiO2)2, for both the PET and PC substrate; however, the maximum principal stresses of three different AR coatings were tensors for the PET substrate, and compressive for the PC substrate. The principal stresses recorded were -916 MPa (Nb2O5/SiO2)2 > 438 MPa (Ta2O5/SiO2)2 > 346 MPa (TiO2/SiO2)2 for PET, and -951 MPa (Nb2O5/SiO2)2 > -838 MPa (Ta2O5/SiO2)2 > -766 MPa (TiO2/SiO2)2 for PC. The different elasticity moduli (ΔE) and relative elasticity between the different film layers may potentially be used to mitigate stress relief in multilayer coatings. |
| ArticleNumber | 140026 |
| Author | Lu, Yu-Ru Chen, Sheng-Bin Chen, Hsi-Chao |
| Author_xml | – sequence: 1 givenname: Hsi-Chao orcidid: 0000-0001-7583-7313 surname: Chen fullname: Chen, Hsi-Chao email: hcchen@yuntech.edu.tw organization: Department of Electronic Engineering, National Yunlin University of Science and Technology, Yunlin 64002, Taiwan – sequence: 2 givenname: Yu-Ru surname: Lu fullname: Lu, Yu-Ru organization: Graduate School of Optoelectronics Engineering, National Yunlin University of Science and Technology, Yunlin 64002, Taiwan – sequence: 3 givenname: Sheng-Bin surname: Chen fullname: Chen, Sheng-Bin organization: Graduate School of Optoelectronics Engineering, National Yunlin University of Science and Technology, Yunlin 64002, Taiwan |
| BookMark | eNp9kM1qAyEQgKWk0CTtA_TmC2yq7mZ16SmE_kGgl_Ysro7UsD_BMaV5hL51Dcmph4CgzMw343wzMhnGAQi552zBGa8ftouEfiGYKBe8YkzUV2TKlWwKIUs-IVPGKlbUrGE3ZIa4ZYxxIcop-V0NAccUx12wFFMERNqD_TI53CP1Y6QueA8RhpRf0IFNMZf2-y6FojMHiNSHLpc62I0YEjjaHmgYh6IF01ODGPAYPKdzgubjO_gJbQcU922eahLgLbn2pkO4O99z8vn89LF-LTbvL2_r1aawopGpcNJK5ZdOVKo1hoEUXKrac1iWohSq5tA2qhF1VSvPVetrLl3VOKlsJSC3KOeEn_raOCJG8HoXQ2_iQXOmjy71VmeX-uhSn1xmRv5jbEjmuEz-e-guko8nEvJK3wGiRhtgsOBCzCq1G8MF-g-YMJQ_ |
| CitedBy_id | crossref_primary_10_1063_5_0188685 crossref_primary_10_1364_AO_540615 crossref_primary_10_1016_j_tsf_2024_140244 |
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| ContentType | Journal Article |
| Copyright | 2023 Elsevier B.V. |
| Copyright_xml | – notice: 2023 Elsevier B.V. |
| DBID | AAYXX CITATION |
| DOI | 10.1016/j.tsf.2023.140026 |
| DatabaseName | CrossRef |
| DatabaseTitle | CrossRef |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering Physics |
| EISSN | 1879-2731 |
| ExternalDocumentID | 10_1016_j_tsf_2023_140026 S0040609023003565 |
| GroupedDBID | --K --M -~X .DC .~1 0R~ 123 1B1 1RT 1~. 1~5 4.4 457 4G. 5VS 7-5 71M 8P~ 9JN AABNK AABXZ AACTN AAEDT AAEDW AAEPC AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AAXUO ABFNM ABFRF ABJNI ABMAC ABNEU ABXRA ABYKQ ACBEA ACDAQ ACFVG ACGFO ACGFS ACRLP ADBBV ADEZE AEBSH AEFWE AEKER AENEX AEZYN AFKWA AFRZQ AFTJW AGUBO AGYEJ AHHHB AIEXJ AIKHN AITUG AIVDX AJOXV ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ AXJTR BKOJK BLXMC CS3 DU5 EBS EFJIC EFLBG EO8 EO9 EP2 EP3 F5P FDB FIRID FNPLU FYGXN G-Q GBLVA IHE J1W KOM M24 M38 M41 MAGPM MO0 N9A O-L O9- OAUVE OGIMB OZT P-8 P-9 P2P PC. Q38 RNS ROL RPZ SDF SDG SDP SES SEW SPC SPCBC SPD SSM SSQ SSZ T5K TWZ WH7 ZMT ~G- 29Q 6TJ AAQXK AATTM AAXKI AAYJJ AAYWO AAYXX ABDPE ABWVN ABXDB ACLOT ACNNM ACRPL ACVFH ADCNI ADMUD ADNMO AEIPS AEUPX AFFNX AFJKZ AFPUW AGHFR AGQPQ AIGII AIIUN AKBMS AKRWK AKYEP ANKPU APXCP ASPBG AVWKF AZFZN BBWZM CITATION EFKBS EJD FEDTE FGOYB G-2 HMV HVGLF HX~ HZ~ NDZJH R2- SMS SPG VOH WUQ ~HD |
| ID | FETCH-LOGICAL-c297t-d7c78f5d248baa0e721786f1e53232861eb98926468f18bf617d49d78c42ec293 |
| IEDL.DBID | .~1 |
| ISSN | 0040-6090 |
| IngestDate | Thu Apr 24 22:50:39 EDT 2025 Wed Oct 01 05:15:14 EDT 2025 Fri Feb 23 02:38:06 EST 2024 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Keywords | Multilayer Flexible electronics Ion-beam assisted deposition Stress behavior Interferometry |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c297t-d7c78f5d248baa0e721786f1e53232861eb98926468f18bf617d49d78c42ec293 |
| ORCID | 0000-0001-7583-7313 |
| ParticipantIDs | crossref_primary_10_1016_j_tsf_2023_140026 crossref_citationtrail_10_1016_j_tsf_2023_140026 elsevier_sciencedirect_doi_10_1016_j_tsf_2023_140026 |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | 2023-10-01 2023-10-00 |
| PublicationDateYYYYMMDD | 2023-10-01 |
| PublicationDate_xml | – month: 10 year: 2023 text: 2023-10-01 day: 01 |
| PublicationDecade | 2020 |
| PublicationTitle | Thin solid films |
| PublicationYear | 2023 |
| Publisher | Elsevier B.V |
| Publisher_xml | – name: Elsevier B.V |
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| SSID | ssj0001223 |
| Score | 2.4496222 |
| Snippet | •Three multilayer films are deposited on flexible substrates with ion-beam assisted deposition.•A phase-shifting shadow moiré interferometer used to measure... |
| SourceID | crossref elsevier |
| SourceType | Enrichment Source Index Database Publisher |
| StartPage | 140026 |
| SubjectTerms | Flexible electronics Interferometry Ion-beam assisted deposition Multilayer Stress behavior |
| Title | Anisotropic stress mechanisms for different dielectric multi-layer films deposited by ion-beam assisted deposition on flexible substrates |
| URI | https://dx.doi.org/10.1016/j.tsf.2023.140026 |
| Volume | 782 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| journalDatabaseRights | – providerCode: PRVESC databaseName: Baden-Württemberg Complete Freedom Collection (Elsevier) customDbUrl: eissn: 1879-2731 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0001223 issn: 0040-6090 databaseCode: GBLVA dateStart: 20110101 isFulltext: true titleUrlDefault: https://www.sciencedirect.com providerName: Elsevier – providerCode: PRVESC databaseName: Elsevier SD Complete Freedom Collection [SCCMFC] customDbUrl: eissn: 1879-2731 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0001223 issn: 0040-6090 databaseCode: ACRLP dateStart: 19950101 isFulltext: true titleUrlDefault: https://www.sciencedirect.com providerName: Elsevier – providerCode: PRVESC databaseName: Elsevier SD Freedom Collection customDbUrl: eissn: 1879-2731 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0001223 issn: 0040-6090 databaseCode: .~1 dateStart: 19950101 isFulltext: true titleUrlDefault: https://www.sciencedirect.com providerName: Elsevier – providerCode: PRVESC databaseName: Elsevier SD Freedom Collection Journals [SCFCJ] - access via UTK customDbUrl: eissn: 1879-2731 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0001223 issn: 0040-6090 databaseCode: AIKHN dateStart: 19950101 isFulltext: true titleUrlDefault: https://www.sciencedirect.com providerName: Elsevier – providerCode: PRVLSH databaseName: Elsevier Journals customDbUrl: mediaType: online eissn: 1879-2731 dateEnd: 99991231 omitProxy: true ssIdentifier: ssj0001223 issn: 0040-6090 databaseCode: AKRWK dateStart: 19670701 isFulltext: true providerName: Library Specific Holdings |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LS8QwEA6yIuhBfOJzycGTELdNX8lxEWV10YMo7q00TQKVbnfZ1oMX7_5rZ_rwAepBKPSRSSiZYfKFfDNDyIkOHO3BvoGpkCfMV37ApJWWiQDwvQ5l5CQYnHxzG44e_OtJMFki510sDNIqW9_f-PTaW7dfBu1sDuZZhjG-sBghrdDD47AQA80x-xfY9NnrJ83D5fyDOYfS3clmzfGqSsziyT3wF06dX-GntenLenO5QdZboEiHzb9skiVTbJG1L-kDt8hKTd9My23yNiyyclYtZvMspU34B50aDOrNymlJAZjSrhJKBU9N7RsQremELE8Ad1Ob5SCqTU3jMpqqFwo6Y8okUwoIG81Bd83QQOGymE1T5YaW4H7qNLflDnm4vLg_H7G2yAJLuYwqpqM0EjbQ3BcqSRwDO8JIhNY1gQdgS4SuUVJIgE2hsK5QFhCP9qWOROpzA0N4u6RXzAqzR6iWrkmQExamytcgwl3LNfgMzSWM4-wTp5veOG0zkGMhjDzuqGZPMWgkRo3EjUb2yelHl3mTfuMvYb_TWfzNhmJYHn7vdvC_bodkFd8aYt8R6VWLZ3MMAKVS_doC-2R5eDUe3eJ9fPc4fgfUNOhJ |
| linkProvider | Elsevier |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LS8QwEB7WFVEPoqvi2xw8CcE2TdvkuIiyuronBW-laRKo7AtbD_4E_7WTPpYV1IPQQ2lmQsmEmS_kmxmACx16OsBzA1URSylXPKTSSktFiPheRzL2Upec_DiKBs_8_iV86cB1mwvjaJWN7699euWtmy9XzWpezfPc5fhiMHK0wsBdh0XhCqzyEH1yF1b7d8PBaOGQfcYW5Dmn0F5uVjSvsnCFPFmALsOrSiz8FJ6WQs7tNmw1WJH069_ZgY6Z9mBzqYJgD9YqBmdW7MJnf5oXs_JtNs8zUmeAkIlxeb15MSkIYlPSNkMp8a1uf4OiFaOQjlOE3sTmYxTVpmJyGU3UB0GzUWXSCUGQ7XaEbodxgOBjXUFNNTakQA9UVbot9uD59ubpekCbPgs0YzIuqY6zWNhQMy5UmnoGD4WxiKxvwgDxloh8o6SQiJwiYX2hLIIezaWORcaZwSmCfehOZ1NzAERL36SOFhZlimsUYb5lGt2GZhLn8Q7Ba5c3yZoi5K4Xxjhp2WavCVokcRZJaoscwuVCZV5X4PhLmLc2S75towQjxO9qR_9TO4f1wdPjQ_JwNxoew4YbqXl-J9At397NKeKVUp01-_ELcyDpUQ |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Anisotropic+stress+mechanisms+for+different+dielectric+multi-layer+films+deposited+by+ion-beam+assisted+deposition+on+flexible+substrates&rft.jtitle=Thin+solid+films&rft.au=Chen%2C+Hsi-Chao&rft.au=Lu%2C+Yu-Ru&rft.au=Chen%2C+Sheng-Bin&rft.date=2023-10-01&rft.issn=0040-6090&rft.volume=782&rft.spage=140026&rft_id=info:doi/10.1016%2Fj.tsf.2023.140026&rft.externalDBID=n%2Fa&rft.externalDocID=10_1016_j_tsf_2023_140026 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0040-6090&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0040-6090&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0040-6090&client=summon |