Machine learning algorithm for the structural design of MEMS resonators - Gu, Liutao; Zhang, Weiping; Lu, Haolin; Wu, Yuting; Fan, Chongyang (Microelectronic engineering, 2023)
Keywords: Finite element analysis method; Flower-like disk resonator; Machine learning; MEMS resonator; Working mode identification algorithm; MEMS resonator; Working mode identification algorithm; Flower-like disk resonator; Finite element analysis method; Machine learning