Color Filter Polishing Optimization Using ANFIS With Sliding-Level Particle Swarm Optimizer - Tsai, Jinn-Tsong; Chou, Ping-Yi; Chou, Jyh-Horng (IEEE transactions on systems, man, and cybernetics. Systems, 2020)
Keywords: Adaptive filters; Adaptive network-based fuzzy inference system (ANFIS); Adaptive systems; Algorithms; chemical mechanical polishing (CMP); Chemical-mechanical polishing; Chemicals; Color; color filter (CF); Fuzzy systems; Glass; Image color analysis; Industrial applications; Neural networks; Optimization; Organic chemistry; Particle swarm optimization; particle swarm optimization (PSO); Pixels; Process parameters; Sliding; sliding-level (SL) method; Slurries; Substrates; Surface roughness