Prediction of Process Variation Effect for Ultrascaled GAA Vertical FET Devices Using a Machine Learning Approach - Ko, Kyul; Lee, Jang Kyu; Kang, Myounggon; Jeon, Jongwook; Shin, Hyungcheol (IEEE transactions on electron devices, 2019)
Keywords: Algorithms; Analytical models; Artificial intelligence; Artificial neural network (ANN); Artificial neural networks; Computation; Computational modeling; Computer simulation; Cost analysis; Data models; Field effect transistors; Gallium arsenide; gate-all-around (GAA); Learning theory; Logic gates; Machine learning; machine learning (ML); Predictions; Process parameters; process variation (PV); Semiconductor devices; Solid modeling; vertical device