APA (7th ed.) Citation

Wang, J., Liu, Y., Liu, X., Li, X., Zhang, H., & Wang, D. (2021). Robust Model-Predictive Control for Inductively Coupled Plasma Generation With a Semiphysical Simulation. IEEE transactions on industrial electronics (1982), 68(4), 3380-3389. https://doi.org/10.1109/TIE.2020.2978720

Chicago Style (17th ed.) Citation

Wang, Junjie, Yanming Liu, Xiaotao Liu, Xiaoping Li, Haojie Zhang, and Di Wang. "Robust Model-Predictive Control for Inductively Coupled Plasma Generation With a Semiphysical Simulation." IEEE Transactions on Industrial Electronics (1982) 68, no. 4 (2021): 3380-3389. https://doi.org/10.1109/TIE.2020.2978720.

MLA (9th ed.) Citation

Wang, Junjie, et al. "Robust Model-Predictive Control for Inductively Coupled Plasma Generation With a Semiphysical Simulation." IEEE Transactions on Industrial Electronics (1982), vol. 68, no. 4, 2021, pp. 3380-3389, https://doi.org/10.1109/TIE.2020.2978720.

Warning: These citations may not always be 100% accurate.