Study of a Palladium (Pd)/Aluminum-Doped Zinc Oxide (AZO) Hydrogen Sensor and the Kalman Algorithm for Internet-of-Things (IoT) Application - Chen, Wei-Cheng; Niu, Jing-Shiuan; Liu, I-Ping; Chi, Cheng-Yu; Cheng, Shiou-Ying; Lin, Kun-Wei; Liu, Wen-Chau (IEEE transactions on electron devices, 2020)
Keywords: Algorithms; Aluminum; Aluminum-doped zinc oxide (AZO); Catalytic activity; Chemical sensors; Computer simulation; Hydrogen; hydrogen sensor; Internet of Things; Internet of Things (IoT); Kalman algorithm; Kalman filters; Metals; Operating temperature; Palladium; Radio frequency; Response time; RF sputtering; Sensors; Sputtering; Thin films; Zinc oxide; Zinc oxides