Study of a Palladium (Pd)/Aluminum-Doped Zinc Oxide (AZO) Hydrogen Sensor and the Kalman Algorithm for Internet-of-Things (IoT) Application

A palladium (Pd) thin film is decorated on a radio frequency (RF) sputtered aluminum-doped zinc oxide (AZO) thin film to produce a hydrogen sensor. Due to the catalytic activity of the Pd metal, the studied thin film-based device shows remarkably enhanced hydrogen-sensing characteristics. Experiment...

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Published inIEEE transactions on electron devices Vol. 67; no. 10; pp. 4405 - 4412
Main Authors Chen, Wei-Cheng, Niu, Jing-Shiuan, Liu, I-Ping, Chi, Cheng-Yu, Cheng, Shiou-Ying, Lin, Kun-Wei, Liu, Wen-Chau
Format Journal Article
LanguageEnglish
Published New York IEEE 01.10.2020
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Algorithms
Aluminum
Aluminum-doped zinc oxide (AZO)
Catalytic activity
Chemical sensors
Computer simulation
Hydrogen
hydrogen sensor
Internet of Things
Internet of Things (IoT)
Kalman algorithm
Kalman filters
Metals
Operating temperature
Palladium
Radio frequency
Response time
RF sputtering
Sensors
Sputtering
Thin films
Zinc oxide
Zinc oxides
Online AccessGet full text
ISSN0018-9383
1557-9646
DOI10.1109/TED.2020.3018084

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Abstract A palladium (Pd) thin film is decorated on a radio frequency (RF) sputtered aluminum-doped zinc oxide (AZO) thin film to produce a hydrogen sensor. Due to the catalytic activity of the Pd metal, the studied thin film-based device shows remarkably enhanced hydrogen-sensing characteristics. Experimentally, a very high sensing response of <inline-formula> <tex-math notation="LaTeX">1.12\times 10 ^{4} </tex-math></inline-formula> with a response time of 23 s is obtained under 1% H 2 /air gas at 300 °C. Furthermore, even under an extremely low concentration of 40-ppb H 2 /air, a sensing response of 0.17 is acquired. The optimal operating temperature of the studied device is 300 °C. A hypothesis is used to interpret the related hydrogen-sensing mechanism of the studied device. A thermodynamic analysis is employed to study the surface coverage of hydrogen molecules on the device's surface. Furthermore, for the application in wireless transmission of the Internet of Things (IoT), an interesting Kalman algorithm is used to reduce redundant data, save hardware costs, and reduce network congestion. The simulated results show that 93.9% of the redundant data can be removed. The studied device exhibits advantages of a simple structure, easy fabrication, low cost, a widespread sensing range of hydrogen concentration, a very high sensing response, and an extremely low detecting limit, as well as being suitable for IoT application.
AbstractList A palladium (Pd) thin film is decorated on a radio frequency (RF) sputtered aluminum-doped zinc oxide (AZO) thin film to produce a hydrogen sensor. Due to the catalytic activity of the Pd metal, the studied thin film-based device shows remarkably enhanced hydrogen-sensing characteristics. Experimentally, a very high sensing response of <inline-formula> <tex-math notation="LaTeX">1.12\times 10 ^{4} </tex-math></inline-formula> with a response time of 23 s is obtained under 1% H 2 /air gas at 300 °C. Furthermore, even under an extremely low concentration of 40-ppb H 2 /air, a sensing response of 0.17 is acquired. The optimal operating temperature of the studied device is 300 °C. A hypothesis is used to interpret the related hydrogen-sensing mechanism of the studied device. A thermodynamic analysis is employed to study the surface coverage of hydrogen molecules on the device's surface. Furthermore, for the application in wireless transmission of the Internet of Things (IoT), an interesting Kalman algorithm is used to reduce redundant data, save hardware costs, and reduce network congestion. The simulated results show that 93.9% of the redundant data can be removed. The studied device exhibits advantages of a simple structure, easy fabrication, low cost, a widespread sensing range of hydrogen concentration, a very high sensing response, and an extremely low detecting limit, as well as being suitable for IoT application.
A palladium (Pd) thin film is decorated on a radio frequency (RF) sputtered aluminum-doped zinc oxide (AZO) thin film to produce a hydrogen sensor. Due to the catalytic activity of the Pd metal, the studied thin film-based device shows remarkably enhanced hydrogen-sensing characteristics. Experimentally, a very high sensing response of [Formula Omitted] with a response time of 23 s is obtained under 1% H2/air gas at 300 °C. Furthermore, even under an extremely low concentration of 40-ppb H2/air, a sensing response of 0.17 is acquired. The optimal operating temperature of the studied device is 300 °C. A hypothesis is used to interpret the related hydrogen-sensing mechanism of the studied device. A thermodynamic analysis is employed to study the surface coverage of hydrogen molecules on the device’s surface. Furthermore, for the application in wireless transmission of the Internet of Things (IoT), an interesting Kalman algorithm is used to reduce redundant data, save hardware costs, and reduce network congestion. The simulated results show that 93.9% of the redundant data can be removed. The studied device exhibits advantages of a simple structure, easy fabrication, low cost, a widespread sensing range of hydrogen concentration, a very high sensing response, and an extremely low detecting limit, as well as being suitable for IoT application.
Author Lin, Kun-Wei
Liu, Wen-Chau
Chi, Cheng-Yu
Liu, I-Ping
Cheng, Shiou-Ying
Niu, Jing-Shiuan
Chen, Wei-Cheng
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Snippet A palladium (Pd) thin film is decorated on a radio frequency (RF) sputtered aluminum-doped zinc oxide (AZO) thin film to produce a hydrogen sensor. Due to the...
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SubjectTerms Algorithms
Aluminum
Aluminum-doped zinc oxide (AZO)
Catalytic activity
Chemical sensors
Computer simulation
Hydrogen
hydrogen sensor
Internet of Things
Internet of Things (IoT)
Kalman algorithm
Kalman filters
Metals
Operating temperature
Palladium
Radio frequency
Response time
RF sputtering
Sensors
Sputtering
Thin films
Zinc oxide
Zinc oxides
Title Study of a Palladium (Pd)/Aluminum-Doped Zinc Oxide (AZO) Hydrogen Sensor and the Kalman Algorithm for Internet-of-Things (IoT) Application
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