Effect of CO2 Addition on Preparation of Diamond Films by Direct-Current Hot-Cathode Plasma Chemical Vapor Deposition Method - 张春梅 郑艳彬 姜志刚 吕宪义 侯雪 胡双 刘军伟 (Chinese physics letters, 2010)
Keywords: Carbon dioxide; Chemical vapor deposition; CO2流量; Crystal structure; Deposition; Diamond films; Grain orientation; Orientation; Plasma (physics); 二氧化碳; 扫描电镜观察; 晶粒取向; 直流热阴极; 等离子体化学气相沉积法; 薄膜制备; 金刚石薄膜