Analysis of proton and γ-ray radiation effects on CMOS active pixel sensors
Radiation effects on complementary metal-oxide-semiconductor(CMOS) active pixel sensors(APS) induced by proton and γ-ray are presented. The samples are manufactured with the standards of 0.35 μm CMOS technology. Two samples have been irradiated un-biased by 23 MeV protons with fluences of 1.43 × 10^...
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Published in | Chinese physics B Vol. 26; no. 11; pp. 264 - 268 |
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Main Author | |
Format | Journal Article |
Language | English |
Published |
01.11.2017
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Subjects | |
Online Access | Get full text |
ISSN | 1674-1056 2058-3834 |
DOI | 10.1088/1674-1056/26/11/114212 |
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Abstract | Radiation effects on complementary metal-oxide-semiconductor(CMOS) active pixel sensors(APS) induced by proton and γ-ray are presented. The samples are manufactured with the standards of 0.35 μm CMOS technology. Two samples have been irradiated un-biased by 23 MeV protons with fluences of 1.43 × 10^11 protons/cm^2 and 2.14 × 10^11 protons/cm-2,respectively, while another sample has been exposed un-biased to 65 krad(Si) ^60Co γ-ray. The influences of radiation on the dark current, fixed-pattern noise under illumination, quantum efficiency, and conversion gain of the samples are investigated. The dark current, which increases drastically, is obtained by the theory based on thermal generation and the trap induced upon the irradiation. Both γ-ray and proton irradiation increase the non-uniformity of the signal, but the nonuniformity induced by protons is even worse. The degradation mechanisms of CMOS APS image sensors are analyzed,especially for the interaction induced by proton displacement damage and total ion dose(TID) damage. |
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AbstractList | Radiation effects on complementary metal-oxide-semiconductor(CMOS) active pixel sensors(APS) induced by proton and γ-ray are presented. The samples are manufactured with the standards of 0.35 μm CMOS technology. Two samples have been irradiated un-biased by 23 MeV protons with fluences of 1.43 × 10^11 protons/cm^2 and 2.14 × 10^11 protons/cm-2,respectively, while another sample has been exposed un-biased to 65 krad(Si) ^60Co γ-ray. The influences of radiation on the dark current, fixed-pattern noise under illumination, quantum efficiency, and conversion gain of the samples are investigated. The dark current, which increases drastically, is obtained by the theory based on thermal generation and the trap induced upon the irradiation. Both γ-ray and proton irradiation increase the non-uniformity of the signal, but the nonuniformity induced by protons is even worse. The degradation mechanisms of CMOS APS image sensors are analyzed,especially for the interaction induced by proton displacement damage and total ion dose(TID) damage. |
Author | 马林东;李豫东;郭旗;文林;周东;冯婕;刘元;曾骏哲;张翔;王田珲 |
AuthorAffiliation | Key Laboratory of Functional Materials and Devices for Special Environments of Chinese Academy of Sciences, Xinjiang Technical Institute of Physics & Chemistry, Urumqi 830011, China;Xinjiang Key Laboratory of Electronic Information Material and Device, Ummqi 830011, China;University of Chinese Academy of Sciences, Beijing 100190, China |
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CitedBy_id | crossref_primary_10_1117_1_JATIS_10_3_036003 crossref_primary_10_1117_1_JATIS_9_4_046003 crossref_primary_10_1117_1_JATIS_10_2_026001 crossref_primary_10_1016_j_radphyschem_2021_109384 crossref_primary_10_1016_j_sse_2018_11_007 crossref_primary_10_1088_1742_6596_1802_3_032083 crossref_primary_10_3390_electronics12122667 |
Cites_doi | 10.1109/23.211391 10.1142/S0129156404002442 10.1109/TNS.2012.2203317 10.1109/TNS.2014.2302038 10.1109/TED.2009.2030623 10.1063/1.4913373 10.1109/23.490905 10.1109/TNS.2002.1039695 10.1109/TNS.2013.2261316 10.1063/1.4896409 10.1109/TNS.2012.2222927 10.1109/TNS.2008.2001040 10.1063/1.4889878 10.1109/TED.2002.807251 |
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Notes | Radiation effects on complementary metal-oxide-semiconductor(CMOS) active pixel sensors(APS) induced by proton and γ-ray are presented. The samples are manufactured with the standards of 0.35 μm CMOS technology. Two samples have been irradiated un-biased by 23 MeV protons with fluences of 1.43 × 10^11 protons/cm^2 and 2.14 × 10^11 protons/cm-2,respectively, while another sample has been exposed un-biased to 65 krad(Si) ^60Co γ-ray. The influences of radiation on the dark current, fixed-pattern noise under illumination, quantum efficiency, and conversion gain of the samples are investigated. The dark current, which increases drastically, is obtained by the theory based on thermal generation and the trap induced upon the irradiation. Both γ-ray and proton irradiation increase the non-uniformity of the signal, but the nonuniformity induced by protons is even worse. The degradation mechanisms of CMOS APS image sensors are analyzed,especially for the interaction induced by proton displacement damage and total ion dose(TID) damage. complementary metal-oxide-semiconductor(CMOS) active pixel sensor dark current fixedpattern noise quantum efficiency Lindong Ma1,2,3, Yudong Li1,2, Qi Guo1,2, Lin Wen1,2, Dong Zhou1,2, Jie Feng1,2, Yuan Liu1,2,3, Junzhe Zeng1,2,3, Xiang Zhang1,2,3, Tianhui Wang1,2,3( 1 Key Laboratory of Functional Materials and Devices for Special Environments of Chinese Academy of Sciences Xinjiang Technical Institute of Physics & Chemistry, Urumqi 830011, China ; 2 Xinjiang Key Laboratory of Electronic Information Material and Device, Urumqi 830011, China ; 3 University of Chinese Academy of Sciences, Beijing 100190, China) 11-5639/O4 |
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References | 11 12 Chen P X (16) 2005 23 13 WANG X Y (18) 2008 14 17 Jan B (8) 2000; 3965 19 Cao C (24) 2014; 23 Jin J (22) 2016; 25 Padmakumar R R (1) 2009 2 Cedric V (10) 2010; 57 3 4 5 6 Wang F (15) 2016; 65 7 Vincent G (9) 2003; 50 20 21 |
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SubjectTerms | cmos γ射线 互补金属氧化物半导体 有源像素传感器 质子辐照 辐射效应 非均匀性 |
Title | Analysis of proton and γ-ray radiation effects on CMOS active pixel sensors |
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