Theoretical study of micro-optical structure fabrication based on sample rotation and two-laser-beam interference
A method for fabricating a micro-optical structure based on sample rotation and two-laser-beam interference is proposed. The rotation process is analyzed using the coordinate transformation in matrix presentation and the theoretical expressions of the optical field distributions corresponding to dif...
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| Published in | Chinese physics B Vol. 26; no. 5; pp. 148 - 152 |
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| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
01.05.2017
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1674-1056 2058-3834 |
| DOI | 10.1088/1674-1056/26/5/054203 |
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| Summary: | A method for fabricating a micro-optical structure based on sample rotation and two-laser-beam interference is proposed. The rotation process is analyzed using the coordinate transformation in matrix presentation and the theoretical expressions of the optical field distributions corresponding to different sample rotations. By rotating the samples and changing the laser wavelength, various special micro-optical structures can be obtained, such as equally spaced concentric rings and irregular trapezoidal lattices; these structures are demonstrated by simulating the corresponding optical field distributions. The proposed approach may be developed into a low-cost laser interference lithography technology for the fabrication of various micro-optical structures. |
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| Bibliography: | Yizhen Chen1, Xiangxian Wang1, Ru Wang1, Hua Yang1, Yunping Qi2 （1 School of Science, Lanzhou University of Technology, Lanzhou 730050, China ;2College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China） 11-5639/O4 A method for fabricating a micro-optical structure based on sample rotation and two-laser-beam interference is proposed. The rotation process is analyzed using the coordinate transformation in matrix presentation and the theoretical expressions of the optical field distributions corresponding to different sample rotations. By rotating the samples and changing the laser wavelength, various special micro-optical structures can be obtained, such as equally spaced concentric rings and irregular trapezoidal lattices; these structures are demonstrated by simulating the corresponding optical field distributions. The proposed approach may be developed into a low-cost laser interference lithography technology for the fabrication of various micro-optical structures. rotation fabrication lithography fabricating rotating coordinate presentation hexagonal coherent grating |
| ISSN: | 1674-1056 2058-3834 |
| DOI: | 10.1088/1674-1056/26/5/054203 |