High-yield and Reproducible Fabrication of High-Q Optical Micro-resonators on Thin-film Lithium Niobate - Shi, Haotian; Zhang, Tianheng; Zhang, Youwen; Zheng, Tiancheng; Nie, Changren; Liu, Chuanquan; Sun, Junqiang (Journal of physics. Conference series, 2025)
Keywords: Acousto-optics; Acoustooptical devices; Fabrication yield; Lithium; Lithium niobates; Optical loss; Optical Micro-resonator; Optical waveguides; Optics; Q factors; Quantum optics; Resonators; Thin films; Thin-film Lithium Niobate