Pulse Density Modulated High Frequency Inverter for Silent Discharge Excimer Lamp Drive

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Bibliographic Details
Published inDenki Gakkai ronbunshi. D, Sangyō ōyō bumonshi
Format Journal Article
LanguageEnglish
Published 2002
Online AccessGet full text
ISSN1348-8163
0913-6339
DOI10.1541/ieejias.122.411

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ISSN:1348-8163
0913-6339
DOI:10.1541/ieejias.122.411