Impact of sublayer thickness and annealing on silicon nanostructures formation in a-Si:H/a-SiNx:H superlattices for photovoltaics - Calta, Pavel; Šutta, Pavol; Medlín, Rostislav; Netrvalová, Marie (Vacuum, 2018)
Keywords: PECVD; Silicon nanocrystal; Silicon nitride; Superlattice; Transmission electron microscopy; X-ray diffraction; X-ray diffraction; Transmission electron microscopy; Silicon nanocrystal; PECVD; Superlattice; Silicon nitride