Dopant diffusion and segregation in semiconductor heterostructures: Part III, diffusion of Si into GaAs - Chen, C.-H.; Gösele, U.M.; Tan, T.Y. (Applied physics. A, Materials science & processing, 1999)
Keywords: Condensed matter: structure, mechanical and thermal properties; Diffusion in solids; Diffusion; interface formation; Exact sciences and technology; Physics; Self-diffusion and ionic conduction in nonmetals; Solid surfaces and solid-solid interfaces; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Transport properties of condensed matter (nonelectronic); Gallium arsenides; Inorganic compounds; Donors; Doped materials; Solid-solid interfaces; Diffusion; Experimental study; Silicon additions; Heterostructures; Acceptors