Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique
The symmetric deposition technique is often used to improve the uniformity of sculptured thin film （STF）. In this paper, optical properties of STF with the columnar angles 4-/3 are analyzed theoretically, based on the characteristic matrix method for extraordinary waves. Then, the transmittances of...
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| Published in | Chinese physics B Vol. 23; no. 11; pp. 556 - 561 |
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| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
01.11.2014
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1674-1056 2058-3834 1741-4199 |
| DOI | 10.1088/1674-1056/23/11/117801 |
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| Abstract | The symmetric deposition technique is often used to improve the uniformity of sculptured thin film （STF）. In this paper, optical properties of STF with the columnar angles 4-/3 are analyzed theoretically, based on the characteristic matrix method for extraordinary waves. Then, the transmittances of uniformity monolayer and bilayer STF in symmetrical style are calculated to show the effect of the bilayer structure on the optical properties of STF. The inhomogeneity of STF is involved in analyzing the differences in transmittance and phase retardation between monolayer and bilayer STF deposited in symmetric style. The results show that optical homogeneity of STF can be improved by depositing in symmetric style at the normal incidence, but it is not the same case as the oblique incidence. |
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| AbstractList | The symmetric deposition technique is often used to improve the uniformity of sculptured thin film (STF). In this paper, optical properties of STF with the columnar angles + or - beta are analyzed theoretically, based on the characteristic matrix method for extraordinary waves. Then, the transmittances of uniformity monolayer and bilayer STF in symmetrical style are calculated to show the effect of the bilayer structure on the optical properties of STF. The inhomogeneity of STF is involved in analyzing the differences in transmittance and phase retardation between monolayer and bilayer STF deposited in symmetric style. The results show that optical homogeneity of STF can be improved by depositing in symmetric style at the normal incidence, but it is not the same case as the oblique incidence. The symmetric deposition technique is often used to improve the uniformity of sculptured thin film （STF）. In this paper, optical properties of STF with the columnar angles 4-/3 are analyzed theoretically, based on the characteristic matrix method for extraordinary waves. Then, the transmittances of uniformity monolayer and bilayer STF in symmetrical style are calculated to show the effect of the bilayer structure on the optical properties of STF. The inhomogeneity of STF is involved in analyzing the differences in transmittance and phase retardation between monolayer and bilayer STF deposited in symmetric style. The results show that optical homogeneity of STF can be improved by depositing in symmetric style at the normal incidence, but it is not the same case as the oblique incidence. |
| Author | 王斌 齐红基 孙卫 何骏 赵娇玲 王虎 候永强 |
| AuthorAffiliation | Key Laboratory of Materials for High Power Laser, Shanghai Institute of Oplics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China University of Chinese Academy of Sciences, Beijing 100049, China |
| Author_xml | – sequence: 1 fullname: 王斌 齐红基 孙卫 何骏 赵娇玲 王虎 候永强 |
| BookMark | eNo9UE1LAzEQDVLBWv0LEjx5qc0km2z2KEWtUPCi57DNJtvIbtJussL-e1NahGGGebw3H-8WzXzwBqEHIM9ApFyBKIslEC5WlK0AcpSSwBWaU8LlkklWzND8n3SDbmP8IUQAoWyOfjehD63xxqUJ177upugiDhZHPXaHNA6mwWnvPLau6yNuzCFElzKYoTj1vUmD0zimqTOZN4Sx3eO2q712vs3z2gxfNC54nIzee3cczR26tnUXzf2lLtD32-vXerPcfr5_rF-2S00FTTkzpnlD7Y5VFd-Rpqg5tUKXtGyqyjSc1iVIzqTllGsJpaWSUi0sVLkXwBbo6Tz3MIS8NibVu6hNly80YYwKSs44ZwXwTBVnqh5CjIOx6jC4vh4mBUSdjFYnD9XJQ0WZAlBno7Pw8SLcB98e8-P_SiGoBCpYwf4AudWAdg |
| Cites_doi | 10.1016/j.apsusc.2009.09.084 10.1117/3.585322 10.1117/1.JNP.7.073502 10.3807/JOSK.2013.17.1.033 10.1088/0031-8949/87/05/055705 10.1364/AO.48.000127 10.3788/COL201311.103101 10.3788/COL20090710.0967 10.1016/S0040-6090(97)00848-1 10.1364/AO.28.002466 10.1063/1.4767634 10.3788/COL201210.042301 10.1201/9781420073034-c2 10.1117/1.2721543 10.1088/1674-1056/22/12/127801 10.3788/COL20080607.0544 10.1016/j.tsf.2006.09.020 10.1038/384616a0 10.1016/S0030-4018(00)00603-9 10.1209/epl/i2004-10490-0 10.3788/COL201210.013104 10.1016/j.tsf.2013.08.003 10.1088/0256-307X/30/1/017802 10.1209/0295-5075/78/17004 10.1364/AO.44.002343 |
| ContentType | Journal Article |
| DBID | 2RA 92L CQIGP ~WA AAYXX CITATION 7U5 8FD H8D L7M |
| DOI | 10.1088/1674-1056/23/11/117801 |
| DatabaseName | 维普期刊资源整合服务平台 中文科技期刊数据库-CALIS站点 维普中文期刊数据库 中文科技期刊数据库- 镜像站点 CrossRef Solid State and Superconductivity Abstracts Technology Research Database Aerospace Database Advanced Technologies Database with Aerospace |
| DatabaseTitle | CrossRef Aerospace Database Solid State and Superconductivity Abstracts Technology Research Database Advanced Technologies Database with Aerospace |
| DatabaseTitleList | Aerospace Database |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Physics |
| DocumentTitleAlternate | Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique |
| EISSN | 2058-3834 1741-4199 |
| EndPage | 561 |
| ExternalDocumentID | 10_1088_1674_1056_23_11_117801 662812634 |
| GroupedDBID | 02O 1JI 1WK 29B 2RA 4.4 5B3 5GY 5VR 5VS 5ZH 6J9 7.M 7.Q 92L AAGCD AAJIO AAJKP AALHV AATNI ABHWH ABJNI ABQJV ACAFW ACGFS ACHIP AEFHF AENEX AFUIB AFYNE AHSEE AKPSB ALMA_UNASSIGNED_HOLDINGS ASPBG ATQHT AVWKF AZFZN BBWZM CCEZO CCVFK CEBXE CHBEP CJUJL CQIGP CRLBU CS3 DU5 EBS EDWGO EJD EMSAF EPQRW EQZZN FA0 FEDTE HAK HVGLF IJHAN IOP IZVLO JCGBZ KNG KOT M45 N5L NT- NT. PJBAE Q02 RIN RNS ROL RPA RW3 SY9 TCJ TGP UCJ W28 ~WA -SA -S~ AAYXX ACARI ADEQX AEINN AERVB AGQPQ AOAED ARNYC CAJEA CITATION Q-- U1G U5K 7U5 8FD H8D L7M |
| ID | FETCH-LOGICAL-c262t-c233c5d2fb3995b0d4a52f6c727d99ed52a718538f525c817f2822c6f1925c613 |
| ISSN | 1674-1056 |
| IngestDate | Fri Sep 05 06:25:10 EDT 2025 Wed Oct 01 03:34:51 EDT 2025 Wed Feb 14 10:35:33 EST 2024 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 11 |
| Language | English |
| License | http://iopscience.iop.org/info/page/text-and-data-mining http://iopscience.iop.org/page/copyright |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-c262t-c233c5d2fb3995b0d4a52f6c727d99ed52a718538f525c817f2822c6f1925c613 |
| Notes | The symmetric deposition technique is often used to improve the uniformity of sculptured thin film （STF）. In this paper, optical properties of STF with the columnar angles 4-/3 are analyzed theoretically, based on the characteristic matrix method for extraordinary waves. Then, the transmittances of uniformity monolayer and bilayer STF in symmetrical style are calculated to show the effect of the bilayer structure on the optical properties of STF. The inhomogeneity of STF is involved in analyzing the differences in transmittance and phase retardation between monolayer and bilayer STF deposited in symmetric style. The results show that optical homogeneity of STF can be improved by depositing in symmetric style at the normal incidence, but it is not the same case as the oblique incidence. birefringence, dielectric thin films, optical properties Wang Bin, Qi Hong-Ji, Sun Wei, He Jun, Zhao Jiao-Ling, Wang Hu, and Hou Yong-Qiang（ a） Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences, Shanghai 201800, China b） University of Chinese Academy of Sciences, Beijing 100049, China 11-5639/O4 ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
| PQID | 1753553415 |
| PQPubID | 23500 |
| PageCount | 6 |
| ParticipantIDs | proquest_miscellaneous_1753553415 crossref_primary_10_1088_1674_1056_23_11_117801 chongqing_primary_662812634 |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | 2014-11-01 |
| PublicationDateYYYYMMDD | 2014-11-01 |
| PublicationDate_xml | – month: 11 year: 2014 text: 2014-11-01 day: 01 |
| PublicationDecade | 2010 |
| PublicationTitle | Chinese physics B |
| PublicationTitleAlternate | Chinese Physics |
| PublicationYear | 2014 |
| References | 22 25 26 27 Qi H J (24) 2007; 78 Hou Y Q (28) 2013; 22 Qi H J (23) 2005; 70 Hou Y Q (15) 2013; 30 Macleod H A (4) 2010 Li L (2) 2012; 10 10 11 12 Fu X Y (13) 2006; 4 16 17 18 19 1 3 Siabi-Garjan A (7) 2013; 87 5 6 8 9 Qi H J (14) 2010 20 21 |
| References_xml | – ident: 10 doi: 10.1016/j.apsusc.2009.09.084 – ident: 18 doi: 10.1117/3.585322 – ident: 22 doi: 10.1117/1.JNP.7.073502 – ident: 21 doi: 10.3807/JOSK.2013.17.1.033 – volume: 87 start-page: 055705 year: 2013 ident: 7 publication-title: Phys. Script. doi: 10.1088/0031-8949/87/05/055705 – ident: 26 doi: 10.1364/AO.48.000127 – start-page: 799519 year: 2010 ident: 14 – ident: 12 doi: 10.3788/COL201311.103101 – ident: 27 doi: 10.3788/COL20090710.0967 – ident: 5 doi: 10.1016/S0040-6090(97)00848-1 – ident: 6 doi: 10.1364/AO.28.002466 – ident: 9 doi: 10.1063/1.4767634 – ident: 1 doi: 10.3788/COL201210.042301 – start-page: 13 year: 2010 ident: 4 publication-title: Thin-Film Optical Filters doi: 10.1201/9781420073034-c2 – ident: 20 doi: 10.1117/1.2721543 – volume: 22 start-page: 127801 issn: 1674-1056 year: 2013 ident: 28 publication-title: Chin. Phys. doi: 10.1088/1674-1056/22/12/127801 – ident: 17 doi: 10.3788/COL20080607.0544 – ident: 11 doi: 10.1016/j.tsf.2006.09.020 – ident: 3 doi: 10.1038/384616a0 – volume: 4 start-page: 247 year: 2006 ident: 13 publication-title: Chin. Opt. Lett. – ident: 19 doi: 10.1016/S0030-4018(00)00603-9 – volume: 10 start-page: 311601 year: 2012 ident: 2 publication-title: Chin. Opt. Lett. – volume: 70 start-page: 257 issn: 0295-5075 year: 2005 ident: 23 publication-title: Europhys. Lett. doi: 10.1209/epl/i2004-10490-0 – ident: 25 doi: 10.3788/COL201210.013104 – ident: 8 doi: 10.1016/j.tsf.2013.08.003 – volume: 30 start-page: 017802 issn: 0256-307X year: 2013 ident: 15 publication-title: Chin. Phys. Lett. doi: 10.1088/0256-307X/30/1/017802 – volume: 78 start-page: 17004 issn: 0295-5075 year: 2007 ident: 24 publication-title: Europhys. Lett. doi: 10.1209/0295-5075/78/17004 – ident: 16 doi: 10.1364/AO.44.002343 |
| SSID | ssj0061023 ssib054405859 ssib000804704 |
| Score | 1.9786627 |
| Snippet | The symmetric deposition technique is often used to improve the uniformity of sculptured thin film （STF）. In this paper, optical properties of STF with the... The symmetric deposition technique is often used to improve the uniformity of sculptured thin film (STF). In this paper, optical properties of STF with the... |
| SourceID | proquest crossref chongqing |
| SourceType | Aggregation Database Index Database Publisher |
| StartPage | 556 |
| SubjectTerms | Deposition Homogeneity Incidence Mathematical analysis Monolayers Optical properties Symmetry Thin films Variability 光学均匀性 均匀性分析 对称式 掠射角 沉积技术 淀积技术 薄膜 雕塑 |
| Title | Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique |
| URI | http://lib.cqvip.com/qk/85823A/201411/662812634.html https://www.proquest.com/docview/1753553415 |
| Volume | 23 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| journalDatabaseRights | – providerCode: PRVIOP databaseName: IOP Science Platform customDbUrl: eissn: 2058-3834 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0061023 issn: 1674-1056 databaseCode: IOP dateStart: 20080101 isFulltext: true titleUrlDefault: https://iopscience.iop.org/ providerName: IOP Publishing |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3di9QwEA_nieCL-InrqUQwT2XdbdqkyWO712UV_Hi4g3srbdqcgtue7q5w_uU-OpN-bBdFVFhKdppm2s6P5Jd0ZkLIy1yaeRnmAN6qiGCCArZQvg2nvuXCar8qgxIX9N--k6vz8M2FuDg6-jHyWtpti1fm-2_jSv7HqiADu2KU7D9YdmgUBFAG-8IRLAzHv7Lxqlk3cLJCJp2Psougc-kVfhpA58hPNSZfWm_Q6RU9tCrMtuRtrtdr3EzLeJvt9edq2K8Ht_QwbeDipYup6r26vCHb65jPsjRkiWLxKUsF0wlLoBAxpVmssaDnTMmEpUuWLJiOWaqYgko-SyXTkqmoq60Gh1onSLFWV2XhsVRju9AWnEtiFnOnDNqMPSyBcq2xoE5ZnHjulkAk8Lo4Zmrpod5E4A-rq15vyhLujRQqbEelrlF0ANF4D8kcHxAk8ATdoka3SOKHXbTgvl-XEcjmosu67WR8LtQ06NdSO5j7o85c9NXbf23S-F-GHIA3rn70CjDCBnNhuIHI9yPV3cZhUm8pOTArGYQ3yE0O4xFuOvL6_YeeQ0hMqIFLBX2rfWy7UrNBNuPBzPdnrQ5MDfKxqS-_AEIOKdYhw3C06ewuudPNd2jcgvceOarq--SW8zs2mwfk2wjCtIcwbSzdQ5gihKmDMB0gTEE0QJg6CNMOwrSHMHUQpnsI0wHCD8n5Mj1brKbdViBTwyXfwjEIjCi5LTAUu8DuRXArDbDvUuuqFDyPkHkqK7gwyo8sukcbaWECIwxQ1kfkuG7q6jGhYaiVVYUtfODe8zBXUVTCSGZzJA_WRBNyMrzJ7KpN-ZIN9pqQWf9uh5POj0OpDC2ToWUyHsDMOmstMyEvehNk0HXj97i8rprdJsMkuUIAjRRP_qjzhNzeY_opOd5-3VXPgApvi-cONT8B3G6U1g |
| linkProvider | IOP Publishing |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Homogeneity+analysis+of+sculptured+thin+films+deposited+in+symmetric+style+through+glancing+angle+deposition+technique&rft.jtitle=%E4%B8%AD%E5%9B%BD%E7%89%A9%E7%90%86B%EF%BC%9A%E8%8B%B1%E6%96%87%E7%89%88&rft.au=%E7%8E%8B%E6%96%8C+%E9%BD%90%E7%BA%A2%E5%9F%BA+%E5%AD%99%E5%8D%AB+%E4%BD%95%E9%AA%8F+%E8%B5%B5%E5%A8%87%E7%8E%B2+%E7%8E%8B%E8%99%8E+%E5%80%99%E6%B0%B8%E5%BC%BA&rft.date=2014-11-01&rft.issn=1674-1056&rft.eissn=2058-3834&rft.issue=11&rft.spage=556&rft.epage=561&rft_id=info:doi/10.1088%2F1674-1056%2F23%2F11%2F117801&rft.externalDocID=662812634 |
| thumbnail_s | http://utb.summon.serialssolutions.com/2.0.0/image/custom?url=http%3A%2F%2Fimage.cqvip.com%2Fvip1000%2Fqk%2F85823A%2F85823A.jpg |