Design and measurement of a piezoresistive triaxial accelerometer based on MEMS technology - 杜春晖 何常德 于佳琪 葛晓洋 张永平 张文栋 (Journal of semiconductors, 2012)
Keywords: Accelerometers; Cantilever beams; Design engineering; MEMS技术; Military; Miniaturization; Nonlinearity; Semiconductors; Structural analysis; 三轴; 加速度计; 悬臂梁结构; 测量; 硅压阻式; 设计; 轴向灵敏度