The resonance frequency shift in an SOI nano-waveguide microring resonator - 臧俊斌 薛晨阳 韦丽萍 刘超 崔丹凤 王永华 张文栋 (Journal of semiconductors, 2013)
Keywords: Deposition; Frequency modulation; Frequency shift; Insulating layers; Nanocomposites; Nanostructure; Semiconductors; Silicon dioxide; SOI; 共振点; 制造过程; 微环; 波导; 环形谐振器; 纳米; 频率偏移