Hybrid quantum annealing genetic algorithm with auxiliary resource dispatching for TFT-LCD array photolithography scheduling and an empirical study

• Published in: Computers & industrial engineering Vol. 203; p. 110989
• Main Authors: Chen, Chia-An, Chien, Chen-Fu, Kuo, Hsuan-An
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.05.2025
• Subjects: Genetic algorithm; Industry 3.5; Parallel machine scheduling; Photolithography; Quantum annealing; TFT-LCD; TFT-LCD; Quantum annealing; Parallel machine scheduling; Photolithography; Genetic algorithm; Industry 3.5
• ISSN: 0360-8352
• DOI: 10.1016/j.cie.2025.110989

[Display omitted] •Hybrid quantum annealing genetic algorithm considering auxiliary resource dispatching is developed for scheduling.•Quantum annealing mutation mechanism can reduce computational time with explicit scheduling.•The HQAGA incorporates auxiliary resource dispatching and utilizes a time-rolling mechanism to deal with dynamics.•An empirical study in a leading TFT-LCD company has shown practical viability of the developed HQAGA.•The HQAGA can significantly enhance production efficiency and reduce waste in real settings. Photolithography that relies on capital-intensive scanners or steppers has been the bottleneck of thin-film transistor-liquid crystal display (TFT-LCD) and semiconductor manufacturing. Photomask as the critical auxiliary resource for photolithography may affect the effectiveness of the TFT-LCD array scheduling. Indeed, as photomasks are increasingly expensive, it is crucial to integrate photolithography scheduling and photomask dispatching that will require managing larger substrates, longer exposure times, and mask-sharing across multiple panel designs among different steppers, complicating effective allocation of photomasks and related auxiliary resources for optimizing the photolithography productivity and overall production efficiency. However, little research has been done to address the present problem for TFT-LCD array photolithography scheduling as a whole and develop effective dispatching solutions for crucial auxiliary resources. Focusing on the realistic needs of TFT-LCD array production, this study aims to develop a hybrid quantum annealing genetic algorithm (HQAGA) integrating the dispatch of auxiliary resources for effective photolithography scheduling. An empirical study was conducted in a leading TFT-LCD array fabrication facility for validation. Comparing to the existing practice and conventional approaches, the results have shown the practical viability of the developed solution, in which the proposed quantum annealing mutation mechanism can obtain desirable solutions of explicit schedules in limited computing time. Indeed, the developed solution is implemented in this case company.