Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control - Chan, Trevor K.; Megens, Mischa; Yoo, Byung-Wook; Wyras, John; Chang-Hasnain, Connie J.; Wu, Ming C.; Horsley, David A. (Optics express, 2013)
Keywords: Algorithms; Equipment Design; Equipment Failure Analysis; Feedback; Interferometry - instrumentation; Lenses; Micro-Electrical-Mechanical Systems - instrumentation