Breakdown voltage model and structure realization of a thin silicon layer with linear variable doping on a silicon on insulator high voltage device with multiple step field plates - 乔明 庄翔 吴丽娟 章文通 温恒娟 张波 李肇基 (Chinese physics B, 2012)
Keywords: Breakdown; Devices; Electric potential; High voltages; Plates; Silicon; Thin films; Voltage; 击穿电压; 地板; 多步; 掺杂; 电压模型; 硅层; 绝缘层上硅; 高电压设备