APA (7th ed.) Citation

Lim, S. H. N., McCulloch, D. G., Bilek, M. M. M., & McKenzie, D. R. (2003). Relation between microstructure and stress in titanium nitride films grown by plasma immersion ion implantation. Journal of applied physics, 93(7), 4283-4288. https://doi.org/10.1063/1.1558995

Chicago Style (17th ed.) Citation

Lim, S. H. N., D. G. McCulloch, M. M. M. Bilek, and D. R. McKenzie. "Relation Between Microstructure and Stress in Titanium Nitride Films Grown by Plasma Immersion Ion Implantation." Journal of Applied Physics 93, no. 7 (2003): 4283-4288. https://doi.org/10.1063/1.1558995.

MLA (9th ed.) Citation

Lim, S. H. N., et al. "Relation Between Microstructure and Stress in Titanium Nitride Films Grown by Plasma Immersion Ion Implantation." Journal of Applied Physics, vol. 93, no. 7, 2003, pp. 4283-4288, https://doi.org/10.1063/1.1558995.