Defect Rescue Method for Microprocessor, Using Bonding Technology with Ar Atom Bombardment - USAMI, Mitsuo; KOHNO, Akiomi; HORINO, Masaya; TASE, Takashi; TOKUDA, Masahide; SASAKI, Yasuhiko (QUARTERLY JOURNAL OF THE JAPAN WELDING SOCIETY, 1998)
Keywords: Ar atom bombardment; defect rescue method; thin LSI film