GAS-JET SYNTHESIS OF DIAMOND COATINGS ON SILICON SUBSTRATES FROM AN H2 + CH4 + Ar MIXTURE ACTIVATED IN A MICROWAVE DISCHARGE

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Published inJournal of applied mechanics and technical physics Vol. 64; no. 5; pp. 748 - 756
Main Authors Emelyanov, A. A., Plotnilkov, M. Yu, Timoshenko, N. I., Yudin, I. B.
Format Journal Article
LanguageEnglish
Published 01.10.2023
Online AccessGet full text
ISSN0021-8944
1573-8620
DOI10.1134/S0021894423050024

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Author Emelyanov, A. A.
Plotnilkov, M. Yu
Timoshenko, N. I.
Yudin, I. B.
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Cites_doi 10.1098/rsta.2000.0542
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10.1134/s0021894422030063
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10.1134/S0015462821010031
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10.1088/1742-6596/2119/1/012119
10.1103/PhysRevApplied.16.014049
10.1134/S002189442005017X
10.1016/j.crhy.2012.10.008
10.3367/UFNr.0185.201502b.0143
10.1134/S0022476621010182
10.1134/s0021894418050012
10.1016/j.diamond.2018.01.011
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Title GAS-JET SYNTHESIS OF DIAMOND COATINGS ON SILICON SUBSTRATES FROM AN H2 + CH4 + Ar MIXTURE ACTIVATED IN A MICROWAVE DISCHARGE
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