GAS-JET SYNTHESIS OF DIAMOND COATINGS ON SILICON SUBSTRATES FROM AN H2 + CH4 + Ar MIXTURE ACTIVATED IN A MICROWAVE DISCHARGE

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Bibliographic Details
Published inJournal of applied mechanics and technical physics Vol. 64; no. 5; pp. 748 - 756
Main Authors Emelyanov, A. A., Plotnilkov, M. Yu, Timoshenko, N. I., Yudin, I. B.
Format Journal Article
LanguageEnglish
Published 01.10.2023
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ISSN0021-8944
1573-8620
DOI10.1134/S0021894423050024

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ISSN:0021-8944
1573-8620
DOI:10.1134/S0021894423050024