GAS-JET SYNTHESIS OF DIAMOND COATINGS ON SILICON SUBSTRATES FROM AN H2 + CH4 + Ar MIXTURE ACTIVATED IN A MICROWAVE DISCHARGE
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Published in | Journal of applied mechanics and technical physics Vol. 64; no. 5; pp. 748 - 756 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
01.10.2023
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Online Access | Get full text |
ISSN | 0021-8944 1573-8620 |
DOI | 10.1134/S0021894423050024 |
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ISSN: | 0021-8944 1573-8620 |
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DOI: | 10.1134/S0021894423050024 |