基于SOI的光波导和V形槽集成器件

文章介绍了一种基于SOI的集成半导体器件。设计了5μm×5μm的单模光波导,并用APSS软件进行了光场模式分析;利用KOH各向异性腐蚀制造了直的脊波导、Y分支器和V形槽;最后,利用紫外光敏胶将波导和光纤固定。

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Published inGuangtongxin Yanjiu pp. 55 - 57
Main Authors 程振杰, 彭治林
Format Journal Article
LanguageChinese
Published 《光通信研究》编辑部 01.01.2003
Subjects
SOI;光波导;Y分支器;V形槽
Online AccessGet full text
ISSN1005-8788
DOI10.3969/j.issn.1005-8788.2003.04.016

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Abstract 文章介绍了一种基于SOI的集成半导体器件。设计了5μm×5μm的单模光波导,并用APSS软件进行了光场模式分析;利用KOH各向异性腐蚀制造了直的脊波导、Y分支器和V形槽;最后,利用紫外光敏胶将波导和光纤固定。
AbstractList 文章介绍了一种基于SOI的集成半导体器件。设计了5μm×5μm的单模光波导,并用APSS软件进行了光场模式分析;利用KOH各向异性腐蚀制造了直的脊波导、Y分支器和V形槽;最后,利用紫外光敏胶将波导和光纤固定。
Author 程振杰
彭治林
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Snippet 文章介绍了一种基于SOI的集成半导体器件。设计了5μm×5μm的单模光波导,并用APSS软件进行了光场模式分析;利用KOH各向异性腐蚀制造了直的脊波导、Y分支器和V形槽;最后,利用紫外...
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SubjectTerms SOI;光波导;Y分支器;V形槽
Title 基于SOI的光波导和V形槽集成器件
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