CMOS Device and Circuit Degradations Subject to \hbox Gate Breakdown and Transient Charge-Trapping Effect

The gate leakage current of HfO 2 MOSFETs exhibits the power law characteristics after soft breakdown (BD) and the linear behavior after hard BD. Fast transient charge-trapping effect (FTCTE) shifts the inverter transfer characteristics but does not affect the high and low output voltages. The ring...

Full description

Saved in:
Bibliographic Details
Published inIEEE transactions on electron devices Vol. 54; no. 1; pp. 59 - 67
Main Authors Yu, Chuanzhao, Yuan, J. S.
Format Journal Article
LanguageEnglish
Published IEEE 01.01.2007
Subjects
Online AccessGet full text
ISSN0018-9383
DOI10.1109/TED.2006.887517

Cover

Abstract The gate leakage current of HfO 2 MOSFETs exhibits the power law characteristics after soft breakdown (BD) and the linear behavior after hard BD. Fast transient charge-trapping effect (FTCTE) shifts the inverter transfer characteristics but does not affect the high and low output voltages. The ring oscillator remains functional after gate BD. The BD position near the drain end of the n-channel transistor increases the noise figure (NF) significantly, whereas FTCTE has minor impact on the NF of the folded cascode low-noise amplifier
AbstractList The gate leakage current of HfO 2 MOSFETs exhibits the power law characteristics after soft breakdown (BD) and the linear behavior after hard BD. Fast transient charge-trapping effect (FTCTE) shifts the inverter transfer characteristics but does not affect the high and low output voltages. The ring oscillator remains functional after gate BD. The BD position near the drain end of the n-channel transistor increases the noise figure (NF) significantly, whereas FTCTE has minor impact on the NF of the folded cascode low-noise amplifier
Author Yu, Chuanzhao
Yuan, J. S.
Author_xml – sequence: 1
  givenname: Chuanzhao
  surname: Yu
  fullname: Yu, Chuanzhao
  organization: Sch. of Electr. Eng. & Comput. Sci., Univ. of Central Florida, Orlando, FL
– sequence: 2
  givenname: J. S.
  surname: Yuan
  fullname: Yuan, J. S.
BookMark eNp9kD1PwzAQhj0UibYwM7D4D6S149hxRkhLQSpiaNmQorNjty7FqRyXj39P2iIGBqbTvdLznu4ZoJ5vvEHoipIRpaQYL6eTUUqIGEmZc5r3UJ8QKpOCSXaOBm276VaRZWkfufLxaYEn5t1pg8HXuHRB713solWAGqJrfIsXe7UxOuLY4Je1aj7xDKLBt8HAa918-CO4DOBbZ3zE5RrCyiRdsNs5v8JTazv4Ap1Z2Lbm8mcO0fPddFneJ_On2UN5M080JYInuWIgLAWaCq5prmpItUxVqnhRCEqU5QWxXKacCqYK4MTWAjLQtZZMaiXYEI1PvTo0bRuMrXbBvUH4qiipDnaqzk51sFOd7HQE_0NoF4-fxwBu-w93feKcMeb3SkZYkVPOvgF9SXW8
CODEN IETDAI
CitedBy_id crossref_primary_10_1016_j_microrel_2011_03_027
crossref_primary_10_1109_TED_2010_2093141
crossref_primary_10_1109_TED_2007_911092
crossref_primary_10_1016_j_microrel_2010_02_009
crossref_primary_10_1109_TED_2008_2003031
crossref_primary_10_1088_0022_3727_43_16_165302
crossref_primary_10_1109_TDMR_2010_2048032
crossref_primary_10_1109_TDMR_2011_2160350
crossref_primary_10_1109_TED_2008_928024
Cites_doi 10.1109/LED.2002.808155
10.1109/RELPHY.2003.1197718
10.1109/RELPHY.2004.1315309
10.1109/16.796299
10.1109/IEDM.2004.1419273
10.1016/j.microrel.2003.08.005
10.1109/LED.2005.852746
10.1109/TED.2005.861597
10.1109/IEDM.2003.1269208
10.1109/7298.974830
10.1109/TDMR.2004.841249
10.1109/55.767093
10.1109/TDMR.2004.838416
10.1557/JMR.1996.0350
10.1109/RELPHY.2004.1315350
10.1038/35023243
10.1109/16.987123
10.1109/16.737455
10.1109/MIKON.1998.740934
10.1109/JSSC.2004.831604
10.1109/RELPHY.2003.1197715
10.1109/ESSDER.2005.1546661
10.1109/LED.2004.839209
10.1109/LED.2003.808844
10.1109/IEDM.1997.650388
10.1109/TED.2005.852546
10.1109/IEDM.2004.1419195
10.1109/TDMR.2003.816656
10.1016/0040-6090(77)90312-1
ContentType Journal Article
DBID 97E
RIA
RIE
AAYXX
CITATION
DOI 10.1109/TED.2006.887517
DatabaseName IEEE All-Society Periodicals Package (ASPP) 2005–Present
IEEE All-Society Periodicals Package (ASPP) 1998–Present
IEEE Xplore (NTUSG)
CrossRef
DatabaseTitle CrossRef
DatabaseTitleList
Database_xml – sequence: 1
  dbid: RIE
  name: IEEE Electronic Library (IEL)
  url: https://proxy.k.utb.cz/login?url=https://ieeexplore.ieee.org/
  sourceTypes: Publisher
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
EndPage 67
ExternalDocumentID 10_1109_TED_2006_887517
4039715
Genre orig-research
GroupedDBID -~X
.DC
0R~
29I
3EH
4.4
5GY
5VS
6IK
97E
AAJGR
AARMG
AASAJ
AAWTH
ABAZT
ABQJQ
ABVLG
ACGFO
ACGFS
ACIWK
ACKIV
ACNCT
AENEX
AETIX
AGQYO
AGSQL
AHBIQ
AI.
AIBXA
AKJIK
AKQYR
ALLEH
ALMA_UNASSIGNED_HOLDINGS
ASUFR
ATWAV
BEFXN
BFFAM
BGNUA
BKEBE
BPEOZ
CS3
DU5
EBS
EJD
F5P
HZ~
H~9
IAAWW
IBMZZ
ICLAB
IDIHD
IFIPE
IFJZH
IPLJI
JAVBF
LAI
M43
MS~
O9-
OCL
P2P
RIA
RIE
RNS
TAE
TN5
VH1
VJK
VOH
AAYXX
CITATION
ID FETCH-LOGICAL-c1065-7b3a6f1a1265c17bda2c82b2b599610bf590f5825163b9a50fd6a4acdc838cb63
IEDL.DBID RIE
ISSN 0018-9383
IngestDate Wed Oct 01 04:50:43 EDT 2025
Thu Apr 24 22:58:00 EDT 2025
Wed Aug 27 06:27:15 EDT 2025
IsPeerReviewed true
IsScholarly true
Issue 1
Language English
License https://ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-c1065-7b3a6f1a1265c17bda2c82b2b599610bf590f5825163b9a50fd6a4acdc838cb63
PageCount 9
ParticipantIDs ieee_primary_4039715
crossref_citationtrail_10_1109_TED_2006_887517
crossref_primary_10_1109_TED_2006_887517
ProviderPackageCode CITATION
AAYXX
PublicationCentury 2000
PublicationDate 2007-Jan.
2007-01-00
PublicationDateYYYYMMDD 2007-01-01
PublicationDate_xml – month: 01
  year: 2007
  text: 2007-Jan.
PublicationDecade 2000
PublicationTitle IEEE transactions on electron devices
PublicationTitleAbbrev TED
PublicationYear 2007
Publisher IEEE
Publisher_xml – name: IEEE
References ref35
ref13
ref34
kerber (ref12) 2003
ref15
ref31
ref30
ref11
ref32
ref10
ref2
ref1
ref16
ref19
ref18
ref24
young (ref33) 2005
ref23
ref26
ref25
ref20
degraeve (ref6) 2001
ref21
ref28
ref27
ref29
ref8
ref7
ref9
roussel (ref22) 2001
ref4
torii (ref17) 2004
ref3
ref5
lee (ref14) 2004
References_xml – start-page: 386
  year: 2001
  ident: ref22
  article-title: accurate and robust noise-based trigger algorithm for soft breakdown detection in ultra thin oxides
  publication-title: Proc Int Reliab Phys Symp Tech Dig
– ident: ref10
  doi: 10.1109/LED.2002.808155
– start-page: 41
  year: 2003
  ident: ref12
  article-title: characterization of the -instability in gate dielectrics
  publication-title: Proc Int Reliab Phys Symp Tech Dig
  doi: 10.1109/RELPHY.2003.1197718
– ident: ref30
  doi: 10.1109/RELPHY.2004.1315309
– ident: ref28
  doi: 10.1109/16.796299
– ident: ref19
  doi: 10.1109/IEDM.2004.1419273
– ident: ref25
  doi: 10.1016/j.microrel.2003.08.005
– ident: ref16
  doi: 10.1109/LED.2005.852746
– ident: ref24
  doi: 10.1109/TED.2005.861597
– start-page: 360
  year: 2001
  ident: ref6
  article-title: relation between breakdown mode and breakdown location in short channel nmosfets and its impact on reliability specifications
  publication-title: Proc Int Reliab Phys Symp Tech Dig
– ident: ref7
  doi: 10.1109/IEDM.2003.1269208
– ident: ref23
  doi: 10.1109/7298.974830
– ident: ref34
  doi: 10.1109/TDMR.2004.841249
– ident: ref11
  doi: 10.1109/55.767093
– ident: ref5
  doi: 10.1109/TDMR.2004.838416
– ident: ref2
  doi: 10.1557/JMR.1996.0350
– start-page: 75
  year: 2005
  ident: ref33
  article-title: interfacial layer dependence of gate stacks on instability and charge trapping using ultra-short pulse characterization
  publication-title: Proc Int Reliab Phys Symp Tech Dig
– ident: ref18
  doi: 10.1109/RELPHY.2004.1315350
– ident: ref1
  doi: 10.1038/35023243
– ident: ref31
  doi: 10.1109/16.987123
– ident: ref26
  doi: 10.1109/16.737455
– ident: ref29
  doi: 10.1109/MIKON.1998.740934
– ident: ref35
  doi: 10.1109/JSSC.2004.831604
– ident: ref4
  doi: 10.1109/RELPHY.2003.1197715
– ident: ref15
  doi: 10.1109/ESSDER.2005.1546661
– ident: ref27
  doi: 10.1109/LED.2004.839209
– ident: ref13
  doi: 10.1109/LED.2003.808844
– ident: ref21
  doi: 10.1109/IEDM.1997.650388
– ident: ref8
  doi: 10.1109/TED.2005.852546
– start-page: 859
  year: 2004
  ident: ref14
  article-title: intrinsic characteristics of high- devices and implications of fast transient charging effect (ftce)
  publication-title: IEDM Tech Dig
– ident: ref32
  doi: 10.1109/IEDM.2004.1419195
– start-page: 129
  year: 2004
  ident: ref17
  article-title: physical model of bti, tddb and silc in -based high- gate dielectrics
  publication-title: IEDM Tech Dig
– ident: ref9
  doi: 10.1109/TDMR.2003.816656
– ident: ref3
  doi: 10.1016/0040-6090(77)90312-1
– ident: ref20
  doi: 10.1109/RELPHY.2003.1197715
SSID ssj0016442
Score 1.8134958
Snippet The gate leakage current of HfO 2 MOSFETs exhibits the power law characteristics after soft breakdown (BD) and the linear behavior after hard BD. Fast...
SourceID crossref
ieee
SourceType Enrichment Source
Index Database
Publisher
StartPage 59
SubjectTerms CMOS oscillators
dielectric breakdown (BD)
fast transient charge effect
Hafnium compounds
High-k dielectric materials
leakage current
Leakage currents
Logic gates
low-noise amplifier (LNA)
Noise measurement
reliability
Stress
Transistors
Title CMOS Device and Circuit Degradations Subject to \hbox Gate Breakdown and Transient Charge-Trapping Effect
URI https://ieeexplore.ieee.org/document/4039715
Volume 54
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
journalDatabaseRights – providerCode: PRVIEE
  databaseName: IEEE Electronic Library (IEL)
  issn: 0018-9383
  databaseCode: RIE
  dateStart: 19630101
  customDbUrl:
  isFulltext: true
  dateEnd: 99991231
  titleUrlDefault: https://ieeexplore.ieee.org/
  omitProxy: false
  ssIdentifier: ssj0016442
  providerName: IEEE
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjV1LSwMxEA61Jz34qmJ9kYMHD-42202yu0etShGqBy30IJS8tpbKVuoWxF_vJNnWIgrewjCBwCTzzHyD0BmJFI00pUHOYx5Q8IgCmUOUYvJUC2akIq4U07vn3T69G7BBDV0se2GMMe7zmQnt0tXy9VTNbaqsRQlYT9tRvpak3PdqLSsGYNc9MngEDxjCrgrGJyJZC1SArzrAg2JuMtm3BVoZqeIsyu0W6i3O4j-STMJ5KUP1-QOm8b-H3UablWuJL_1d2EE1U-yijRXAwQYad3oPj_jaWPWARaFxZzxT83EJpNFM-PFK7xiUic3O4HKKn1_k9APbFBu-AvdyoiFodxudjbO9lNgW7EcmAIKFehhhj4e8h_q3N0-dblANWwgURIUsSGQseB6JqM2ZihKpRVulbdmWFr8lIjJnGcmZbXTlscwEI7nmggqlVRqnSvJ4H9WLaWEOEBYUtASoTVAHmhqi0wQYlKAqVQkTTDZRuBDAUFVI5HYgxuvQRSQkG4LE7HxMPvQSa6Lz5YY3D8LxN2vDimLJVknh8HfyEVr3uVqbUjlG9XI2NyfgZJTy1N2uL-X5zig
linkProvider IEEE
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjV1LSwMxEA5FD-rBt_g2Bw8e3DbbTdLdo1alPqoHW-hBWPLaWiqt1F0Qf72TZK1FFLyFYQKBSeaZ-QahYxIqGmpKg4xHPKDgEQUygyjFZLEWzEhFXCmmfc9bXXrTY70KOp32whhj3OczU7VLV8vXY1XYVFmNErCetqN8nlFKme_WmtYMwLJ7bPAQnjAEXiWQT0iSGigBX3eAJ8XcbLJvGzQzVMXZlKsV1P46jf9KMqwWuayqjx9Ajf897ipaLp1LfOZvwxqqmNE6WpqBHNxAg2b74RFfGKsgsBhp3BxMVDHIgdSfCD9g6Q2DOrH5GZyP8dOzHL9jm2TD5-BgDjWE7W6js3K2mxLbkn3fBECwYA997BGRN1H36rLTbAXluIVAQVzIgoaMBM9CEdY5U2FDalFXcV3WpUVwCYnMWEIyZltdeSQTwUimuaBCaRVHsZI82kJzo_HIbCMsKOgJUJygEDQ1RMcNYFCCqlg1mGByB1W_BJCqEovcjsR4SV1MQpIUJGYnZPLUS2wHnUw3vHoYjr9ZN6wopmylFHZ_Jx-hhVanfZfeXd_f7qFFn7m1CZZ9NJdPCnMALkcuD91N-wTc0dF1
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=CMOS+Device+and+Circuit+Degradations+Subject+to+%5Chbox+Gate+Breakdown+and+Transient+Charge-Trapping+Effect&rft.jtitle=IEEE+transactions+on+electron+devices&rft.au=Yu%2C+Chuanzhao&rft.au=Yuan%2C+J.+S.&rft.date=2007-01-01&rft.pub=IEEE&rft.issn=0018-9383&rft.volume=54&rft.issue=1&rft.spage=59&rft.epage=67&rft_id=info:doi/10.1109%2FTED.2006.887517&rft.externalDocID=4039715
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0018-9383&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0018-9383&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0018-9383&client=summon