APA (7th ed.) Citation

Phung, Q. M., Vancoillie, S., Pourtois, G., Swerts, J., Pierloot, K., & Delabie, A. (2013). Atomic Layer Deposition of Ruthenium on a Titanium Nitride Surface: A Density Functional Theory Study. Journal of physical chemistry. C, 117(38), 19442-19453. https://doi.org/10.1021/jp405489w

Chicago Style (17th ed.) Citation

Phung, Quan Manh, Steven Vancoillie, Geoffrey Pourtois, Johan Swerts, Kristine Pierloot, and Annelies Delabie. "Atomic Layer Deposition of Ruthenium on a Titanium Nitride Surface: A Density Functional Theory Study." Journal of Physical Chemistry. C 117, no. 38 (2013): 19442-19453. https://doi.org/10.1021/jp405489w.

MLA (9th ed.) Citation

Phung, Quan Manh, et al. "Atomic Layer Deposition of Ruthenium on a Titanium Nitride Surface: A Density Functional Theory Study." Journal of Physical Chemistry. C, vol. 117, no. 38, 2013, pp. 19442-19453, https://doi.org/10.1021/jp405489w.