Na-Assisted Molecular Beam Epitaxy of MoS2

Transition metal dichalcogenides (TMDs) hold great promise for next-generation electronics, where both large-domain growth and atomic-level doping control are essential for optimal device performance. While molecular beam epitaxy (MBE) provides unparalleled precision in thickness and composition con...

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Published inInorganic chemistry Vol. 64; no. 36; pp. 18521 - 18528
Main Authors Wang, Jia-Min, Bao, Yang, Shao, Jing-Jing, Ju, Lin-Feng, Qin, Feng, Yan, Jia-Xu, Jing, Peng-Tao, Xu, Ji-Lian, Zhan, Da, Liu, Deming, Liu, Lei, Shen, Dezhen, Xu, Hai
Format Journal Article
LanguageEnglish
Published American Chemical Society 15.09.2025
Online AccessGet full text
ISSN0020-1669
1520-510X
1520-510X
DOI10.1021/acs.inorgchem.5c03229

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Abstract Transition metal dichalcogenides (TMDs) hold great promise for next-generation electronics, where both large-domain growth and atomic-level doping control are essential for optimal device performance. While molecular beam epitaxy (MBE) provides unparalleled precision in thickness and composition control, its application to TMD growth has been fundamentally limited by small domain sizes. Here, we demonstrate a sodium-assisted MBE (Na-MBE) technique to achieve single-crystalline MoS2 domains exceeding 1 μm on Au(111), which is an order of magnitude larger over MoS2 grown on the same substrate with standard MBE techniques. Crucially, in situ studies reveal Na2S as a key growth intermediate that enhances growth rate and sulfur supply. The versatility of this method is demonstrated through the synthesis of compositionally uniform alloyed TMDs (Mo0.5W0.5S2), highlighting its potential for producing doping-controlled 2D materials with micron-scale single-crystalline domains.
AbstractList Transition metal dichalcogenides (TMDs) hold great promise for next-generation electronics, where both large-domain growth and atomic-level doping control are essential for optimal device performance. While molecular beam epitaxy (MBE) provides unparalleled precision in thickness and composition control, its application to TMD growth has been fundamentally limited by small domain sizes. Here, we demonstrate a sodium-assisted MBE (Na-MBE) technique to achieve single-crystalline MoS2 domains exceeding 1 μm on Au(111), which is an order of magnitude larger over MoS2 grown on the same substrate with standard MBE techniques. Crucially, in situ studies reveal Na2S as a key growth intermediate that enhances growth rate and sulfur supply. The versatility of this method is demonstrated through the synthesis of compositionally uniform alloyed TMDs (Mo0.5W0.5S2), highlighting its potential for producing doping-controlled 2D materials with micron-scale single-crystalline domains.
Transition metal dichalcogenides (TMDs) hold great promise for next-generation electronics, where both large-domain growth and atomic-level doping control are essential for optimal device performance. While molecular beam epitaxy (MBE) provides unparalleled precision in thickness and composition control, its application to TMD growth has been fundamentally limited by small domain sizes. Here, we demonstrate a sodium-assisted MBE (Na-MBE) technique to achieve single-crystalline MoS2 domains exceeding 1 μm on Au(111), which is an order of magnitude larger over MoS2 grown on the same substrate with standard MBE techniques. Crucially, in situ studies reveal Na2S as a key growth intermediate that enhances growth rate and sulfur supply. The versatility of this method is demonstrated through the synthesis of compositionally uniform alloyed TMDs (Mo0.5W0.5S2), highlighting its potential for producing doping-controlled 2D materials with micron-scale single-crystalline domains.Transition metal dichalcogenides (TMDs) hold great promise for next-generation electronics, where both large-domain growth and atomic-level doping control are essential for optimal device performance. While molecular beam epitaxy (MBE) provides unparalleled precision in thickness and composition control, its application to TMD growth has been fundamentally limited by small domain sizes. Here, we demonstrate a sodium-assisted MBE (Na-MBE) technique to achieve single-crystalline MoS2 domains exceeding 1 μm on Au(111), which is an order of magnitude larger over MoS2 grown on the same substrate with standard MBE techniques. Crucially, in situ studies reveal Na2S as a key growth intermediate that enhances growth rate and sulfur supply. The versatility of this method is demonstrated through the synthesis of compositionally uniform alloyed TMDs (Mo0.5W0.5S2), highlighting its potential for producing doping-controlled 2D materials with micron-scale single-crystalline domains.
Author Shao, Jing-Jing
Shen, Dezhen
Jing, Peng-Tao
Wang, Jia-Min
Xu, Ji-Lian
Bao, Yang
Qin, Feng
Liu, Lei
Liu, Deming
Yan, Jia-Xu
Ju, Lin-Feng
Zhan, Da
Xu, Hai
AuthorAffiliation Chinese Academy of Sciences
State Key Laboratory of Luminescence Science and Technology, Changchun Institute of Optics, Fine Mechanics and Physics
University of Chinese Academy of Sciences
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