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Research on wafer CMP temperature online detection compensation algorithm based on GA-BP improved neural network
Li, Binjie, Shen, Kuan, Song, Zhilong, Lyu, Binghai, Zhao, Wenhong
Published in IEEE access (01.01.2025)
Published in IEEE access (01.01.2025)
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Journal Article
Staggering Preventive Maintenance Actions at CMP Using a Dispatching Algorithm
Ramakrishnan, Srikanth, Chakravorty, Shiladitya, Tay, Jensen, Olsen, David, Zumpano, Peter
Published in ASMC proceedings (01.08.2020)
Published in ASMC proceedings (01.08.2020)
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Conference Proceeding
ECP- and CMP-Aware Detailed Routing Algorithm for DFM
Shen, Yin, Zhou, Qiang, Cai, Yici, Hong, Xianlong
Published in IEEE transactions on very large scale integration (VLSI) systems (01.01.2010)
Published in IEEE transactions on very large scale integration (VLSI) systems (01.01.2010)
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Journal Article
A Partition-Merge Based Cache-Conscious Parallel Sorting Algorithm for CMP with Shared Cache
Song Hao, Zhihui Du, Bader, D.A., Yin Ye
Published in 2009 International Conference on Parallel Processing (01.09.2009)
Published in 2009 International Conference on Parallel Processing (01.09.2009)
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Conference Proceeding
Provably good and practically efficient algorithms for CMP dummy fill
Feng, Chunyang, Zhou, Hai, Yan, Changhao, Tao, Jun, Zeng, Xuan
Published in Proceedings of the 46th Annual Design Automation Conference (26.07.2009)
Published in Proceedings of the 46th Annual Design Automation Conference (26.07.2009)
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Conference Proceeding