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High volume semiconductor manufacturing using nanoimprint lithography
Hamaya, Zenichi, Seki, Junichi, Asano, Toshiya, Sakai, Keita, Aghili, Ali, Mizuno, Makoto, Choi, Jin, Jones, Chris
Year of Publication 03.10.2018
Year of Publication 03.10.2018
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Conference Proceeding
Soft Graphoepitaxy for Large Area Directed Self-Assembly of Polystyrene-block-Poly(dimethylsiloxane) Block Copolymer on Nanopatterned POSS Substrates Fabricated by Nanoimprint Lithography
Borah, Dipu, Rasappa, Sozaraj, Salaun, Mathieu, Zellsman, Marc, Lorret, Olivier, Liontos, George, Ntetsikas, Konstantinos, Avgeropoulos, Apostolos, Morris, Michael A.
Published in Advanced functional materials (01.06.2015)
Published in Advanced functional materials (01.06.2015)
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Journal Article
The advantages of nanoimprint lithography for semiconductor device manufacturing
Asano, Toshiya, Sakai, Keita, Yamamoto, Kiyohito, Hiura, Hiromi, Nakayama, Takahiro, Hayashi, Tomohiko, Takabayashi, Yukio, Iwanaga, Takehiko, Resnick, Douglas J
Year of Publication 27.06.2019
Year of Publication 27.06.2019
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Conference Proceeding
The advantages of nanoimprint lithography for semiconductor device manufacturing
Sakai, Keita, Yamamoto, Kiyohito, Hiura, Hiromi, Nakayama, Takahiro, Asano, Toshiya, Hayashi, Tomohiko, Takabayashi, Yukio, Iwanaga, Takehiko, Resnick, Douglas J
Year of Publication 26.03.2019
Year of Publication 26.03.2019
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Conference Proceeding
Non-sticky polyvinylsilazane stamp with high durability for UV-nanoimprint lithography
Park, Hyun-Ha, Park, Sungjune, Kim, Hana, Lim, HyungJun, Kim, Dong-Pyo, Lee, JaeJong
Published in Microelectronic engineering (01.10.2012)
Published in Microelectronic engineering (01.10.2012)
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Journal Article
Conference Proceeding
Novel Fluorinated Polymers for Releasing Material in Nanoimprint Lithography
Morita, Masamichi, Yamashita, Tsuneo, Yamamoto, Ikuo
Published in Journal of Photopolymer Science and Technology (01.01.2012)
Published in Journal of Photopolymer Science and Technology (01.01.2012)
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Journal Article
Improving light output and coincidence time resolution of scintillating crystals using nanoimprinted photonic crystal slabs
Pots, Rosalinde Hendrika, Salomoni, Matteo, Gundacker, Stefan, Zanettini, Silvia, Gâté, Valentin, Usureau, Elise, Turover, Daniel, Lecoq, Paul, Auffray, Etiennette
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.10.2019)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.10.2019)
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Journal Article
The interplay between emitter conformality and field‐effect passivation in pyramid structured silicon solar devices
Razzaq, Arsalan, Depauw, Valérie, John, Joachim, Gordon, Ivan, Szlufcik, Jozef, Abdulraheem, Yaser, Poortmans, Jef
Published in Progress in photovoltaics (01.03.2021)
Published in Progress in photovoltaics (01.03.2021)
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Journal Article
Micro-Nano Surface Functionalization of Materials and Thin Films for Optical Applications
Year of Publication 2021
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eBook
Progress in nanoimprint wafer and mask systems for high volume semiconductor manufacturing
Imoto, Kohei, Hiura, Mitsuru, Morohoshi, Hiroshi, Hayashi, Tatsuya, Kimura, Atsushi, Suzaki, Yoshio, Choi, Jin
Year of Publication 16.10.2017
Year of Publication 16.10.2017
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Conference Proceeding
Performance of a nanoimprint mask replication system
Kimura, Atsushi, Imoto, Kohei, Sato, Chiaki, Yamamoto, Kiyohito, Inada, Hiroshi, Hiura, Mitsuru, Iwanaga, Takehiko, Aghili, Ali, Mizuno, Makoto, Choi, Jin, Jones, Chris
Year of Publication 19.03.2018
Year of Publication 19.03.2018
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Conference Proceeding
Tender Are Invited For Uv-nanoimprint Lithography Instrument the Subject Matter Of This Public Contract Is Supply (acquisition) Of A Device Which Will Serve For Step-and-repeat Process Enabling A Preparation Of Series Of Copies Of Micro/nanostructures On
Published in MENA Report
(15.05.2025)
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