Search Results - "LYMBEROPOULOS, DIMITRIS P" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Vyzkoušejte nový nástroj s podporou AI Summon Research Assistant BETA

Cover Image

Fluid simulations of glow discharges: Effect of metastable atoms in argon

by Lymberopoulos, Dimitris P., Economou, Demetre J.
Published in Journal of applied physics (15.04.1993)

Get full text

Journal Article

Cover Image

Two-dimensional simulation of polysilicon etching with chlorine in a high density plasma reactor

by Lymberopoulos, D.P., Economou, D.J.
Published in IEEE transactions on plasma science (01.08.1995)

Get full text

Journal Article

Cover Image

Two-dimensional direct simulation Monte Carlo (DSMC) of reactive neutral and ion flow in a high density plasma reactor

by Economou, D.J., Bartel, T.J., Wise, R.S., Lymberopoulos, D.P.
Published in IEEE transactions on plasma science (01.08.1995)

Get full text

Journal Article

Cover Image

FAULT DETECTION AND VIRTUAL SENSOR METHODS FOR TOOL FAULT MONITORING

by LYMBEROPOULOS DIMITRIS P, REISS TERRY
Year of Publication 20.03.2002

Get full text

Patent

Cover Image

Two-Dimensional Self-Consistent Radio Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference RF Reference Cell

by Lymberopoulos, Dimitris P, Economou, Demetre J
Published in Journal of research of the National Institute of Standards and Technology (01.07.1995)

Get full text

Journal Article

Cover Image

Rapid two-dimensional self-consistent simulation of inductively coupled plasma and comparison with experimental data

by Wise, Richard S., Lymberopoulos, Dimitris P., Economou, Demetre J.
Published in Applied physics letters (29.04.1996)

Get full text

Journal Article

Cover Image

Fluid simulations of radio frequency glow discharges: Two-dimensional argon discharge including metastables

by Lymberopoulos, Dimitris P., Economou, Demetre J.
Published in Applied physics letters (01.11.1993)

Get full text

Journal Article

Cover Image

Spatiotemporal electron dynamics in radio-frequency glow discharges: fluid versus dynamic Monte Carlo simulations

by Lymberopoulos, D P, Economou, D J
Published in Journal of physics. D, Applied physics (14.04.1995)

Get full text

Journal Article

Cover Image

Fault detection and virtual sensor methods for tool fault monitoring

by Reiss, Terry, Lymberopoulos, Dimitris P
Year of Publication 17.05.2005

Get full text

Patent

Cover Image

Fault detection and virtual sensor methods for tool fault monitoring

by REISS TERRY, LYMBEROPOULOS DIMITRIS P
Year of Publication 17.05.2005

Get full text

Patent

Cover Image

Fault detection method and apparatus

by LYMBEROPOULOS, DIMITRIS P, REISS, TERRY
Year of Publication 18.02.2004

Get full text

Patent

Cover Image

Fault detection utilizing specialized health index generated from related sensor groupings

by LYMBEROPOULOS, DIMITRIS P, REISS, TERRY
Year of Publication 21.01.2003

Get full text

Patent

Cover Image

Fault detection and virtual sensor methods for tool fault monitoring

by REISS TERRY, LYMBEROPOULOS DIMITRIS P
Year of Publication 09.05.2002

Get full text

Patent

Cover Image

Fault detection method and apparatus

by LYMBEROPOULOS, DIMITRIS P, REISS, TERRY
Year of Publication 27.03.2002

Get full text

Patent

Cover Image

Ion density and temperature distributions in an inductively coupled high-plasma density reactor

by Lymberopoulos, D.P., Wise, R.S., Economou, D.J., Bartel, T.J.
Published in IEEE transactions on plasma science (01.02.1996)

Get full text

Journal Article

Cover Image

Film thickness control using spectral interferometry

by BALASUBRAMHANYA LALITHA S, DAVIDOW JED E, LYMBEROPOULOS DIMITRIS P, SARFATY MOSHE
Year of Publication 08.07.2003

Get full text

Patent

Cover Image

Film thickness control using spectral interferometry

by Sarfaty, Moshe, Balasubramhanya, Lalitha S, Davidow, Jed E, Lymberopoulos, Dimitris P
Year of Publication 08.07.2003

Get full text

Patent

Cover Image

Film thickness control using spectral interferometry

by BALASUBRAMHANYA LALITHA S, DAVIDOW JED E, LYMBEROPOULOS DIMITRIS P, SARFATY MOSHE
Year of Publication 29.08.2002

Get full text

Patent

Cover Image

Integrated equipment set for forming a low K dielectric interconnect on a substrate

by HUNG HOIMAN, SHANMUGASUNDRAM ARULKUMAR, LYMBEROPOULOS DIMITRIS P, LI HONGWEN, NAIK MEHUL, ARMACOST MICHAEL D, SARFATY MOSHE, PAN JUDON T
Year of Publication 02.11.2006

Get full text

Patent

Cover Image

Film thickness control using spectral interferometry

by BALASUBRAMHANYA LALITHA S, DAVIDOW JED E, LYMBEROPOULOS DIMITRIS P, SARFATY MOSHE
Year of Publication 02.07.2002

Get full text

Patent