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Development of a massively parallel electron beam write (MPEBW) system: aiming for the digital fabrication of integrated circuits
Esashi, Masayoshi, Miyaguchi, Hiroshi, Kojima, Akira, Ikegami, Naokatsu, Koshida, Nobuyoshi, Ohyi, Hideyuki
Published in Japanese Journal of Applied Physics (01.06.2022)
Published in Japanese Journal of Applied Physics (01.06.2022)
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