by Ocola, Leonidas E., Palacios, Edgar
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.11.2013)

by Lomenzo, Patrick D., Zhao, Peng, Takmeel, Qanit, Moghaddam, Saeed, Nishida, Toshikazu, Nelson, Matthew, Fancher, Chris M., Grimley, Everett D., Sang, Xiahan, LeBeau, James M., Jones, Jacob L.
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.05.2014)

by Hasegawa, Hideki, Akazawa, Masamichi
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (01.07.2007)

by Pi, Shuang, Lin, Peng, Xia, Qiangfei
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.11.2013)

by Levchenko, Igor, Keidar, Michael, Xu, Shuyan, Kersten, Holger, Ostrikov, Kostya (Ken)
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.09.2013)

by Livengood, Richard, Tan, Shida, Greenzweig, Yuval, Notte, John, McVey, Shawn
Published in Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena (01.11.2009)

by Alvarez, Rafael, Lopez-Santos, Carmen, Parra-Barranco, Julian, Rico, Victor, Barranco, Angel, Cotrino, Jose, Gonzalez-Elipe, Agustin R., Palmero, Alberto
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.07.2014)

by Kumar, Vibhor, Maan, Anup Singh, Akhtar, Jamil
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.07.2014)

by Chen, Zhuo, Mucha, John A., Donnelly, Vincent M., Economou, Demetre J.
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.11.2013)

by Su, Weitao, Roy, Debdulal
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.07.2013)

by Jung, Daewoong, Han, Maeum, Lee, Gil S.
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.07.2014)

by Longo, Roberto C., McDonnell, Stephen, Dick, D., Wallace, R. M., Chabal, Yves J., Owen, James H. G., Ballard, Josh B., Randall, John N., Cho, Kyeongjae
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.05.2014)

by Vervisch, V., Etienne, H., Torregrosa, F., Roux, L., Ottaviani, L., Pasquinelli, M., Sarnet, T., Delaporte, P.
Published in Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures (01.01.2008)

by Wei, Xing, Wu, Ai Min, Chen, Meng, Chen, Jing, Zhang, Miao, Wang, Xi, Lin, Cheng Lu
Published in Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena (01.11.2008)

by Zhao, Xin-Hao, DiNezza, Michael J., Liu, Shi, Lin, Su, Zhao, Yuan, Zhang, Yong-Hang
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.07.2014)

by Geng, Yanquan, Yan, Yongda, Xing, Yangming, Zhang, Qi, Zhao, Xuesen, Hu, Zhenjiang
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.11.2013)

by Lv, Wen, Liu, Shiyuan, Xia, Qi, Wu, Xiaofei, Shen, Yijiang, Lam, Edmund Y.
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.07.2013)

by Isoyan, A., Jiang, F., Cheng, Y. C., Cerrina, F., Wachulak, P., Urbanski, L., Rocca, J., Menoni, C., Marconi, M.
Published in Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena (01.11.2009)

by Tseng, Yu-Chih, Peng, Qing, Ocola, Leonidas E., Czaplewski, David A., Elam, Jeffrey W., Darling, Seth B.
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.11.2011)

by Benner, Frank, Jordan, Paul M., Richter, Claudia, Simon, Daniel K., Dirnstorfer, Ingo, Knaut, Martin, Bartha, Johann W., Mikolajick, Thomas
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.05.2014)