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电磁场模拟磁控溅射装置中磁场的空间分布

by 王晓明高健波周艳文
Published in 实验室研究与探索 (2016)

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靶电流密度对热丝增强等离子磁控溅射制备Cr2N薄膜结构与性能的影响

by 张鑫;王晓明;高健波;郭媛媛;解志文;周艳文
Published in 功能材料 (30.03.2018)

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Journal Article