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Search Results - "王喜凤 宋远红 赵书霞 戴忠玲 王友年"
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Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH_4/Ar Discharge
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王喜凤 宋远红 赵书霞 戴忠玲 王友年
Published in
Plasma science & technology
(01.04.2016)
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physics
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放电脉冲
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氩
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