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  • Search Results - "微电子机械系统"
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微电子机械系统装置及调整其可动部件的形状的方法

Year of Publication 14.03.2023
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致动器板分割以及控制装置和方法

Year of Publication 20.04.2018
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Calibration device and method for tunable filter of hyperspectral micro-electro-mechanical system

by ASHKENAZI, ELIAHU, CHAM, LEVIN, PELLE, SADAN, DOR
Year of Publication 18.10.2022
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