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Search Results - "何敖东 刘波 宋志棠 吕业刚 李俊焘 刘卫丽 封松林 吴关平"
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Chemical mechanical planarization of amorphous Ge_2Sb_2Te_5 with a soft pad
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何敖东 刘波 宋志棠 吕业刚 李俊焘 刘卫丽 封松林 吴关平
Published in
半导体学报:英文版
(2013)
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engineering
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cmp
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化学机械平坦化
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