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一种微机械加速度计

Year of Publication 03.01.2023

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Patent

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一种微机械加速度计控制方法及装置

Year of Publication 12.12.2023

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Patent

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一种三轴微机械加速度计及其控制方法

Year of Publication 15.08.2025

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Patent

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全方位动热源式Z轴微机械加速度计及其加工方法

Year of Publication 22.04.2025

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Patent

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全方位动热源摆式双轴微机械加速度计及其加工方法

Year of Publication 18.04.2025

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Patent

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全方位动热源摆式三轴微机械加速度计及其加工方法

Year of Publication 18.04.2025

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Patent

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动热源摆式全方位微机械加速度计及其加工方法

Year of Publication 11.10.2024

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Patent

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一种微机械加速度计及其校准补偿方法

Year of Publication 27.05.2022

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Patent

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全方位动热源摆式三轴微机械加速度计

Year of Publication 10.05.2022

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Patent

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动热源摆式全方位微机械加速度计

Year of Publication 06.05.2022

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Patent

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硅微机械加速度计

Year of Publication 22.06.2018

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Patent

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一种Z轴微机械加速度计及其控制方法

Year of Publication 26.12.2023

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Patent

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一种可调低刚度微机械加速度计

Year of Publication 07.05.2021

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Patent

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一种基于PT对称谐振器的微机械加速度计及其检测方法

Year of Publication 02.08.2022

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一种高振型稳定性的宽频响硅微机械加速度计

Year of Publication 14.06.2022

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基于静电等效力的微机械加速度计自标定方法

Year of Publication 05.04.2022

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Patent

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全方位动热源式单轴微机械加速度计及其加工方法

Year of Publication 01.02.2022

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Patent

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种折叠梁式高灵敏度微机械加速度计

Year of Publication 24.05.2017

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Patent

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一种基于机械超材料的加速度敏感机构及复合灵敏度微机械加速度计

Year of Publication 12.11.2019

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Patent

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种V形梁扭摆式单轴微机械加速度计及其制备方法

Year of Publication 13.04.2018

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Patent

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