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  • Search Results - "本征沉积速率"
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一种测量CVD/CVI工艺前驱体本征沉积速率的方法

Year of Publication 05.04.2022
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丙烯的热解炭沉积机理建模

by 方文放, 袁经超, 王梦千, 彭雨晴, 张丹, 李爱军
Published in 新型炭材料(中英文) (01.12.2024)

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Method for measuring intrinsic deposition rates of precursors of CVI(chemical vapor deposition)/CVD (chemical vapor deposition) process

by ZHANG DAN, LI AIJUN, FANG WENFANG
Year of Publication 20.09.2019
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