Ultra clean processing of semiconductor surfaces XV selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) : selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium.
Saved in:
| Corporate Author | |
|---|---|
| Other Authors | , , , |
| Format | Electronic eBook |
| Language | English |
| Published |
Baech, Switzerland :
Scientific.Net : distributed worldwide by Trans Tech Publications Ltd,
[2021]
|
| Series | Solid state phenomena,
volume 314. |
| Subjects | |
| Online Access | Full text |
| ISBN | 9783035718010 3035718016 9783035738018 (PDF ebook) |
| ISSN | 1012-0394 ; |
| Physical Description | 1 online resource (xiv, 325 pages :) illustrations. |
Cover
| LEADER | 00000cam a2200000Mi 4500 | ||
|---|---|---|---|
| 001 | kn-on1340114445 | ||
| 003 | OCoLC | ||
| 005 | 20240717213016.0 | ||
| 006 | m o d | ||
| 007 | cr cn||||||||| | ||
| 008 | 211129s2021 sz a ob 101 0 eng d | ||
| 040 | |a COA |b eng |c COA |d OCLCF |d OCLCQ |d OCLCO | ||
| 020 | |a 9783035718010 | ||
| 020 | |a 3035718016 | ||
| 020 | |z 9783035738018 (PDF ebook) | ||
| 024 | 8 | |a (WaSeSS)ssj0002574294 | |
| 035 | |a (OCoLC)1340114445 | ||
| 111 | 2 | |a International Symposium on Ultra Clean Processing of Semiconductor Surfaces |n (15th : |d 2021 : |c Mechelen, Belgium) | |
| 240 | 1 | 0 | |a Ultra clean processing of semiconductor surfaces XV (Online) |
| 245 | 1 | 0 | |a Ultra clean processing of semiconductor surfaces XV |h [electronic resource] : |b selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) : selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium. |
| 260 | |a Baech, Switzerland : |b Scientific.Net : |b distributed worldwide by Trans Tech Publications Ltd, |c [2021] | ||
| 300 | |a 1 online resource (xiv, 325 pages :) |b illustrations. | ||
| 490 | 0 | |a Solid state phenomena, |x 1012-0394 ; |v volume 314. | |
| 504 | |a Includes bibliographical references and index. | ||
| 506 | |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty | ||
| 590 | |a Knovel |b Knovel (All titles) | ||
| 650 | 0 | |a Semiconductors |x Surfaces |v Congresses. | |
| 650 | 0 | |a Semiconductors |v Congresses. | |
| 655 | 7 | |a elektronické knihy |7 fd186907 |2 czenas | |
| 655 | 9 | |a electronic books |2 eczenas | |
| 700 | 1 | |a Mertens, Paul. | |
| 700 | 1 | |a Wostyn, Kurt. | |
| 700 | 1 | |a Meuris, Marc. | |
| 700 | 1 | |a Heyns, Marc. | |
| 856 | 4 | 0 | |u https://proxy.k.utb.cz/login?url=https://app.knovel.com/hotlink/toc/id:kpUCPSSXV2/ultra-clean-processing?kpromoter=marc |y Full text |