Ultra clean processing of semiconductor surfaces XV selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) : selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium.

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Bibliographic Details
Corporate Author International Symposium on Ultra Clean Processing of Semiconductor Surfaces Mechelen, Belgium
Other Authors Mertens, Paul, Wostyn, Kurt, Meuris, Marc, Heyns, Marc
Format Electronic eBook
LanguageEnglish
Published Baech, Switzerland : Scientific.Net : distributed worldwide by Trans Tech Publications Ltd, [2021]
SeriesSolid state phenomena, volume 314.
Subjects
Semiconductors > Surfaces > Congresses.
Semiconductors > Congresses.
elektronické knihy
electronic books
Online AccessFull text
ISBN9783035718010
3035718016
9783035738018 (PDF ebook)
ISSN1012-0394 ;
Physical Description1 online resource (xiv, 325 pages :) illustrations.

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Bibliography:Includes bibliographical references and index.
ISBN:9783035718010
3035718016
9783035738018 (PDF ebook)
ISSN:1012-0394 ;
Access:Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty
Physical Description:1 online resource (xiv, 325 pages :) illustrations.

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