MEMS resonator filters

This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in various frequency ranges a...

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Bibliographic Details
Other Authors Patrikar, Rajendra M. (Editor)
Format Electronic eBook
LanguageEnglish
Published London, United Kingdom : The Institution of Engineering and Technology, 2020.
SeriesMaterials, circuits and devices series ; 65.
Subjects
Microelectromechanical systems.
Filters and filtration.
elektronické knihy
electronic books
Online AccessFull text
ISBN9781785618970
1785618970
1785618962
9781785618963
1523129808
9781523129805
Physical Description1 online resource (xiii, 424 pages) : illustrations (mostly color)

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Table of Contents:
  • Introduction / Rajendra M. Patrikar
  • Filter design / Rajesh Junghare, Raghvendra Deshmukh and Rajendra Patrikar
  • Microelectromechanical resonators design : low-frequency resonators / Amol Morankar
  • Microelectromechanical resonator design for high frequency / Prasanna Deshpande and Rajesh Pande
  • Finite-element modeling of RF MEMS resonators / Ravi Solanki, Sakthi Swarrup J and Ashutosh Mahajan
  • Fabrication of low-frequency resonators / Amol Morankar
  • Fabrication of high-frequency resonators / Prasanna Deshpande and Rajesh Pande
  • Filter and oscillator design using SAW/BAW resonators / Motoaki Hara
  • Testing and verification of MEMS resonator filters / Vasu Pulijala
  • 3D packaging for the integration of hterogeneous systems / Pavani Vamsi Krishna Nittala, Prosenjit Sen, K.N. Bhat, and M.M. Nayak
  • Reliability issues of MEMS resonators / Poorvi K. Joshi and Meghana A. Hasamnis.

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