The chemical history of lithography

"This volume is the first in a series of three books that make up the second edition of Chemistry and Lithography, which is continued in volume 2 (Chemistry in Lithography) and volume 3 (The Practice of Lithography). Each volume is a unit in itself and can stand alone, which is fortunate in vie...

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Bibliographic Details
Main Author Okoroanyanwu, Uzodinma (Author)
Format Electronic eBook
LanguageEnglish
Published Bellingham, Washington (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2020.
EditionSecond edition.
SeriesSPIE Press monograph ; PM313.
Subjects
Lithography.
Chemistry, Technical.
Semiconductors > Etching.
elektronické knihy
electronic books
Online AccessFull text
ISBN9781510631564
1510631569
9781510631571
1510631577
9781510631588
1510631585
9781510631557
1510631550
Physical Description1 online resource (274 pages)

Cover

Table of Contents:
  • General preface to the second edition
  • Acronyms and abbreviations
  • 1. Introduction to lithography
  • 2. Invention of lithography and photolithography: 2.1. Introduction; 2.2. Invention of lithography; 2.3. Invention of photolithography; 2.4. Pioneers of photolithography
  • 3. Physical origins of lithography: 3.1. Introduction; 3.2. Key developments in optical physics that enabled the invention and development of lithography; 3.3. Key developments in optical instruments and glassmaking technologies that enabled the development of lithography; 3.4. Key developments in atomic and molecular physics that enabled the invention and development of lithography
  • 4. Chemical origins of lithography: 4.1. Introduction; 4.2. Key developments in chemistry that enabled the invention and development of lithography; 4.3. Laws and theories of chemical reactions; 4.4. Rational synthesis of chemical substances; 4.5. The structure of chemical compounds and phenomena deriving from them
  • 5. Evolution of lithography: 5.1. Introduction; 5.2. Offset lithography; 5.3. The printed circuit board and the development of the electronics industry; 5.4. The transistor and microelectronics revolution; 5.5. Semiconductor lithography; 5.6. Advanced lithographic patterning techniques and imaging mechanisms; 5.7. Outlook on the evolution of lithography
  • Index.

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