Characterisation and control of defects in semiconductors

• Other Authors: Tuomisto, Filip, (Editor)
• Format: eBook
• Language: English
• Published: Stevenage : The Institution of Engineering and Technology, 2019.
• Series: Materials, circuits and devices series ; 45.
• Subjects: Ion implantation.; Magnetic resonance.; Semiconductor doping.; Semiconductors > Materials.; Silicon.; elektronické knihy; electronic books
• ISBN: 1785616560; 9781785616563; 9781785616556; 1785616552
• Physical Description: 1 online resource (596 pages)
• Access: Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty

The following topics are dealt with: semiconductor defect control; semiconductor doping; ion beam effects; ion implantation; elemental semiconductors; silicon; electrically active defects; point defect luminescence; vibrational spectroscopy; magnetic resonance methods; muons; positron annihilation spectroscopy; first principles methods; microscopy; 3D atomic-scale studies; ion beam modification; and ion beam analysis and channelling.