Catalytic Chemical Vapor Deposition : Technology and Applications of Cat-CVD

The authoritative reference on catalytic chemical vapor deposition'written by the inventor of the technology This comprehensive book covers a wide scope of Cat-CVD and related technologies'from the fundamentals to the many applications, including the design of a Cat-CVD apparatus. Featurin...

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Bibliographic Details
Main Author Matsumura, H. (Author)
Format Electronic eBook
LanguageEnglish
Published Weinheim, Germany : Wiley-VCH, [2019]
Subjects
Catalysts.
Chemical vapor deposition.
elektronické knihy
electronic books
Online AccessFull text
ISBN9783527818662
3527818669
9783527818655
3527818650
352734523X
9783527345236
Physical Description1 online resource

Cover

Table of Contents:
  • Fundamentals for Studying the Physics of Cat-CVD and Difference from PECVD
  • Fundamentals for Analytical Methods for Revealing Chemical Reactions in Cat-CVD
  • Physics and Chemistry of Cat-CVD
  • Properties of Inorganic Films Prepared by Cat-CVD
  • Organic Polymer Synthesis by Cat-CVD-Related Technology
  • Initiated CVD (iCVD)
  • Physics and Technologies for Operating Cat-CVD Apparatus
  • Application of Cat-CVD Technologies
  • Radicals Generated in Cat-CVD Apparatus and Their Application
  • Cat-doping: A Novel Low-Temperature Impurity Doping Technology.

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