Catalytic Chemical Vapor Deposition : Technology and Applications of Cat-CVD
The authoritative reference on catalytic chemical vapor deposition'written by the inventor of the technology This comprehensive book covers a wide scope of Cat-CVD and related technologies'from the fundamentals to the many applications, including the design of a Cat-CVD apparatus. Featurin...
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| Main Author: | |
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| Format: | eBook |
| Language: | English |
| Published: |
Weinheim, Germany :
Wiley-VCH,
[2019]
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| Subjects: | |
| ISBN: | 9783527818662 3527818669 9783527818655 3527818650 352734523X 9783527345236 |
| Physical Description: | 1 online resource |
Cover
Table of contents
| LEADER | 04450cam a2200421 i 4500 | ||
|---|---|---|---|
| 001 | kn-on1085348592 | ||
| 003 | OCoLC | ||
| 005 | 20240717213016.0 | ||
| 006 | m o d | ||
| 007 | cr cn||||||||| | ||
| 008 | 190211s2019 gw ob 001 0 eng d | ||
| 040 | |a N$T |b eng |e rda |e pn |c N$T |d N$T |d DG1 |d UKMGB |d RECBK |d OCLCF |d DG1 |d UKAHL |d YDX |d COO |d OCLCQ |d OCLCO |d OCLCQ |d OCLCO |d OCLCQ |d SFB |d OCLCQ |d OCLCO |d OCLCL | ||
| 020 | |a 9783527818662 |q (electronic bk.) | ||
| 020 | |a 3527818669 |q (electronic bk.) | ||
| 020 | |a 9783527818655 |q (electronic bk. ; |q oBook) | ||
| 020 | |a 3527818650 |q (electronic bk. ; |q oBook) | ||
| 020 | |a 352734523X | ||
| 020 | |a 9783527345236 | ||
| 020 | |z 9783527345236 | ||
| 035 | |a (OCoLC)1085348592 |z (OCoLC)1085592940 |z (OCoLC)1104299158 |z (OCoLC)1104392774 | ||
| 100 | 1 | |a Matsumura, H. |q (Hideki), |e author. |1 https://id.oclc.org/worldcat/entity/E39PCjGyJMTyMRWbyjFbyJqtPP | |
| 245 | 1 | 0 | |a Catalytic Chemical Vapor Deposition : |b Technology and Applications of Cat-CVD / |c Hideki Matsumura and 3 others. |
| 264 | 1 | |a Weinheim, Germany : |b Wiley-VCH, |c [2019] | |
| 300 | |a 1 online resource | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 505 | 0 | |a Fundamentals for Studying the Physics of Cat-CVD and Difference from PECVD -- Fundamentals for Analytical Methods for Revealing Chemical Reactions in Cat-CVD -- Physics and Chemistry of Cat-CVD -- Properties of Inorganic Films Prepared by Cat-CVD -- Organic Polymer Synthesis by Cat-CVD-Related Technology -- Initiated CVD (iCVD) -- Physics and Technologies for Operating Cat-CVD Apparatus -- Application of Cat-CVD Technologies -- Radicals Generated in Cat-CVD Apparatus and Their Application -- Cat-doping: A Novel Low-Temperature Impurity Doping Technology. | |
| 504 | |a Includes bibliographical references and index. | ||
| 506 | |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty | ||
| 520 | |a The authoritative reference on catalytic chemical vapor deposition'written by the inventor of the technology This comprehensive book covers a wide scope of Cat-CVD and related technologies'from the fundamentals to the many applications, including the design of a Cat-CVD apparatus. Featuring contributions from four senior leaders in the field'including the father of catalytic chemical vapor deposition'it also introduces some of the techniques used in the observation of Cat-CVD related phenomena so that readers can understand the concepts of such techniques. Catalytic Chemical Vapor Deposition: Technology and Applications of Cat-CVD begins by reviewing the analytical tools for elucidating the chemical reactions in Cat-CVD, such as laser-induced fluorescence and deep ultra-violet absorption, and explains in detail the underlying physics and chemistry of the Cat-CVD technology. Subsequently it provides an overview of the synthesis and properties of Cat-CVD-prepared inorganic and organic thin films. The last parts of this unique book are devoted to the design and operation of Cat-CVD apparatuses and the applications.-Provides coherent coverage of the fundamentals and applications of catalytic chemical vapor deposition (Cat-CVD) -Assembles in one place the state of the art of this rapidly growing field, allowing new researchers to get an overview that is difficult to obtain solely from journal articles -Presents comparisons of different Cat-CVD methods which are usually not found in research papers -Bridges academic and industrial research'showing how CVD can be scaled up from the lab to large-scale industrial utilization in the high-tech industry Catalytic Chemical Vapor Deposition: Technology and Applications is an excellent one-stop resource for researchers and engineers working on or entering the field of Cat-CVD, Hot-Wire CVD, iCVD, and related technologies. | ||
| 590 | |a Knovel |b Knovel (All titles) | ||
| 650 | 0 | |a Catalysts. | |
| 650 | 0 | |a Chemical vapor deposition. | |
| 655 | 7 | |a elektronické knihy |7 fd186907 |2 czenas | |
| 655 | 9 | |a electronic books |2 eczenas | |
| 776 | 0 | 8 | |i Print version: |a Matsumura, H. (Hideki). |t Catalytic Chemical Vapor Deposition. |d Weinheim, Germany : Wiley-VCH, [2019] |z 352734523X |z 9783527345236 |w (OCoLC)1028165603 |
| 856 | 4 | 0 | |u https://proxy.k.utb.cz/login?url=https://app.knovel.com/hotlink/toc/id:kpCCVDTAC1/catalytic-chemical-vapor?kpromoter=marc |y Full text |
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